Model R-CX300 is forsolid-stateBatteriesR&D & Pilotvacuum systemRoll-to-Roll CoatingEquipment，used forLithium Metal Anodeand oxide/sulfide coating development。
supportingmulti-modulesources（evaporation/magnetron/ion beamreplaceable），capable of depositing LiPON、LLZO、Al₂O₃、TiO₂、Nb₂O₅、Li₆PS₅Cl（LPSCl）、Li₃PS₄ etc.multipleelectrolyteandprotective layer materials。
web tension control ±0.5N，supportinginert atmosphereandglovebox integration，evaporationpower 10-50kW，vacuum level ≤5×10⁻⁵Pa，width 300mm（extendable to 600mm）。
R-CX300 forsolid-stateBatteriescutting-edge R&D，supportingLithium Metal Anodedepositionandoxide/sulfideelectrolyte（LiPON、LLZO、LPSCl etc.）flexible coating development。
multi-modulesourcesquickly switchableevaporation、magnetron、ion beamprocess，withand ±0.5N high-precision tension controlandinert atmosphereenvironment，forsolid-stateBatteriesmaterialsandprocessvalidationprovidingpilot platform。
evaporation/magnetron/ion beamreplaceable，suitable forwithmultipleelectrolyteandprotective layer materials。
web tension ±0.5N，ensuringultra-thin substratesstableweb handling。
supportinginert atmosphereandglovebox integration，suitable forwithlithium metaletc.activitymaterials。
Tel: +86 177 0673 8165
Tel: +86 21 6888 7654
Tel: +86 755 2998 3301
Tel: +86 512 6238 9900
Tel: +86 28 8765 4321