Model L

L1000 is a three-chamber vertical in-line DPC (Direct Plated Copper) ceramic metallization coating system designed specifically for high-end electronic device thermal management and high-density integration needs.

The system precisely focuses on cutting-edge fields such as semiconductors, power devices, and optical communications, aiming to solve core process bottlenecks in high-precision applications such as AI computing server substrates, automotive LiDAR VCSEL packaging, and RF front-end modules.

With outstanding process stability and productivity, L1000 provides a system-level solution for high-aspect-ratio via metallization and high-quality thin film deposition on DPC ceramic substrates.

Introduction

In terms of technology architecture, L1000 innovatively adopts a three-chamber vertical in-line design. The central chamber serves as the core coating zone, with product rack reciprocating chambers on both sides, forming an efficient, closed continuous production loop.

Products use vertical top-loading with bottom-fixed fixtures, effectively avoiding coating chipping and surface dust accumulation. This architecture not only breaks through the technology barriers of traditional PVD sputtering in uniformity and adhesion, but also comprehensively enables high-quality mass production of DPC ceramic substrates with the combined performance of low temperature, high speed, and high ionization rate.

Core Advantages

Ultra-Fast Deposition Efficiency

Breaking through productivity bottlenecks, meeting high-efficiency mass production needs for high-density integrated devices.

HiPIMS-Grade High Ionization Rate

Enhancing film performance, improving coating quality and adhesion.

Low-Temperature Rapid Deposition

Zero-defect surface quality, low-temperature process protects sensitive substrates.

Correlation Applications

Correlation Technology

Correlation Component

Headquarters - Jiaxing Factory
1661 Xingping 2nd Road, Pinghu Industrial Park, Zhejiang Province, China 314200

Tel: +86 177 0673 8165

Shanghai Branch
Room 1208, Science Park Tower, Zhangjiang High-Tech Park, Pudong

Tel: +86 21 6888 7654

Shenzhen Office
Building B, Hi-Tech Industrial Park, Bao'an District

Tel: +86 755 2998 3301

Suzhou Service Center
Suzhou Industrial Park, No.88 Xingzhou Road

Tel: +86 512 6238 9900

Chengdu Branch
High-Tech West Zone, Chengdu, Sichuan Province

Tel: +86 28 8765 4321

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