{"id":2281,"date":"2023-09-01T10:04:03","date_gmt":"2023-09-01T02:04:03","guid":{"rendered":"https:\/\/www.naxau.cn\/?post_type=docs&#038;p=2281"},"modified":"2025-02-10T10:27:14","modified_gmt":"2025-02-10T02:27:14","password":"","slug":"\u4ec0\u4e48\u662f-dlc-\u6d82\u5c42","status":"publish","type":"docs","link":"https:\/\/www.naxauie.com\/zh\/\u6587\u6863\/\u4ec0\u4e48\u662f-dlc-\u6d82\u5c42\/","title":{"rendered":"\u4ec0\u4e48\u662f DLC \u6d82\u5c42"},"content":{"rendered":"<h2>01 DLC\u7684\u7eb3\u72ee\u5e38\u89c1\u79cd\u7c7b<\/h2>\n<p>DLC\uff08DIAMOND-LIKE CARBON\uff09\u7c7b\u91d1\u521a\u77f3\u78b3\u6d82\u5c42\uff0c\u662f\u4e00\u79cdSP3\uff08\u91d1\u521a\u77f3\u7ed3\u6784\uff09\u548cSP2\uff08\u77f3\u58a8\u7ed3\u6784\uff09\u6216\u4e0e\u6c22\u3001\u7845\u3001\u6c1f\u548c\u91d1\u5c5e\u7b49\u5143\u7d20\u6742\u5316\u7684\u4eba\u5de5\u6750\u6599\u3002DLC\u662f\u78b3\u819c\u6750\u6599\u7684\u7edf\u79f0\uff0c\u5b83\u5177\u6709\u9ad8\u786c\u5ea6\u3001\u8010\u8150\u8680\u3001\u4f4e\u6469\u64e6\u3001\u7535\u7edd\u7f18\u7b49\u591a\u79cd\u7279\u6027\uff0c\u5176\u5404\u5f02\u5316\u7684\u6027\u80fd\u53d6\u51b3\u4e8e\u7ed3\u6784\u952e\u7684\u6bd4\u4f8b\u548c\u914d\u4f4d\u952e\u5143\u7d20\u7684\u79cd\u7c7b\u3002<\/p>\n<p>DLC\u5177\u6709\u90e8\u5206\u91d1\u521a\u77f3\u7684\u7279\u6027\uff0c\u6bd4\u5de5\u4e1a\u4e2d\u4f7f\u7528\u7684\u5927\u591a\u6570\u91d1\u5c5e\u6750\u6599\u90fd\u8981\u786c\u3002\u662f\u673a\u68b0\u8bbe\u5907\u4e2d\u6700\u5e38\u7528\u7684\u81ea\u6da6\u6ed1\u6d82\u5c42\u3002<\/p>\n<ul>\n<li>a-C = \u65e0\u6c22\u975e\u6676\u78b3\u819c<\/li>\n<li>a-C:H = \u542b\u6c22\u975e\u6676\u78b3\u819c<\/li>\n<li><a href=\"\/docs\/ta-c\uff0c\u8d85\u4f4e\u6e29\u6c89\u79ef\u91d1\u521a\u77f3\u6d82\u5c42\/\" target=\"_blank\" rel=\"noopener\">ta-C = \u56db\u9762\u4f53\u65e0\u6c22\u975e\u6676\u78b3\u819c<\/a><\/li>\n<li>ta-C:H = \u56db\u9762\u4f53\u542b\u6c22\u975e\u6676\u78b3\u819c<\/li>\n<li>a-C:X = \u5143\u7d20\u63ba\u6742\u65e0\u6c22\u975e\u6676\u78b3\u819c<\/li>\n<\/ul>\n<p data-title=\"\u56fe\u7247\u5c3a\u5bf8\uff1a900 x 658\"><img loading=\"lazy\" decoding=\"async\" class=\"attachment-large size-large wp-image-4103 alignnone\" title=\"\u56fe\u7247\u5c3a\u5bf8\uff1a900 x 658\" src=\"https:\/\/www.naxauie.com\/wp-content\/uploads\/2023\/07\/DLC\u7ed3\u6784\u79cd\u7c7b.jpg\" alt=\"DLC\u6d82\u5c42\u7ed3\u6784\u79cd\u7c7b\" width=\"900\" height=\"658\" \/><\/p>\n<h2>02 DLC\u6d82\u5c42\u7684\u5e94\u7528\u548c\u7279\u6027\uff1aNaxau Coating<\/h2>\n<p>DLC\u53ef\u4ee5\u901a\u8fc7\u8c03\u6574sp3\u3001sp2\u53ca\u5143\u7d20\u63ba\u6742\uff0c\u5b9e\u73b0\u5404\u79cd\u5b9a\u5236\u5316\u529f\u80fd\u6d82\u5c42\u3002<\/p>\n<ul>\n<li>\u9ad8\u786c\u5ea6\uff1a2000HV-6000HV<\/li>\n<li>\u4f4e\u6469\u64e6\u7cfb\u6570\uff080.02\u20130.2\uff09<\/li>\n<li>\u9ad8\u8010\u8150\u8680\u6027\uff08\u589e\u52a0\u539a\u5ea6\u3001\u589e\u52a0\u6253\u5e95\u5c42\u53ef\u4ee5\u663e\u8457\u63d0\u5347\u8010\u8150\u8680\u6027\uff09<\/li>\n<li>\u5bf9\u57fa\u6750\u7684\u9644\u7740\u529b\u5f3a<\/li>\n<li>\u8010\u5fae\u52a8\u6027<\/li>\n<li>\u7c98\u5408\u8010\u78e8\u6027<\/li>\n<li>\u5e72\u78e8\u635f\u6761\u4ef6\u4e0b\u7684\u81ea\u6da6\u6ed1<\/li>\n<li>\u7ea610 ~100-6 \u03a9\u7edd\u7f18\u6216\u5bfc\u7535\uff0c\u901a\u5e38\u542b\u6c22DLC\u7edd\u7f18<\/li>\n<\/ul>\n<h2>03 DLC\u6d82\u5c42\u5e38\u89c1\u5e94\u7528\uff1a<\/h2>\n<ul>\n<li>\u94dd\u3001\u94dd\u5408\u91d1\u3001\u7c89\u672b\u51b6\u91d1\u5408\u91d1\u52a0\u5de5\u5200\u5177<\/li>\n<li>\u91d1\u5c5e\u6210\u578b\u6a21\u5177\u3001\u6a61\u80f6\u6a21\u5177\u3001\u5851\u6599\u6ce8\u5851\u6a21\u5177<\/li>\n<li>\u5851\u6599\u548c\u6324\u51fa\u6a21\u5177\uff0c\u5177\u6709\u8010\u78e8\u3001\u8010\u8150\u8680\u3001\u826f\u597d\u7684\u8131\u6a21\u6027\u548c\u6297\u83cc\u6027\u80fd<\/li>\n<li>\u6db2\u538b\u90e8\u4ef6\u2014\u2014\u6c14\u7f38\u3001\u6d3b\u585e\u6746\u3001\u9f7f\u8f6e\u6cf5\u3001\u5bfc\u5411\u73af\u3001\u9876\u6746<\/li>\n<li>\u9600\u95e8\u7ec4\u4ef6\u2014\u2014\u7403\u4f53\u3001\u95e8\u95f8\u3001\u7403\u9600\u3001\u6267\u884c\u673a\u6784<\/li>\n<li>\u6c7d\u8f66\u96f6\u90e8\u4ef6\u2014\u2014\u66f2\u8f74\u3001\u51f8\u8f6e\u8f74\u3001\u9f7f\u8f6e\u3001\u8f74\u627f\u3001\u6d3b\u585e\u73af\u3001\u633a\u6746\u3001\u8155\u9500\u3001\u55b7\u6cb9\u5668<\/li>\n<li>\u6cf5\u90e8\u4ef6\u2014\u2014\u53f6\u8f6e\u3001\u6269\u6563\u5668\u3001\u8f6c\u5b50<\/li>\n<li>\u673a\u68b0\u8f74\u5c01<\/li>\n<li>\u96f6\u4ef6\u7edd\u7f18<\/li>\n<li>\u9ad8\u7aef\u9ed1\u8272\u5916\u89c2\u88c5\u9970\u9540\u2014\u2014\u8868\u6846\u3001\u667a\u80fd\u624b\u73af\u7b49\u7a7f\u6234\u8bbe\u5907<\/li>\n<\/ul>\n<h2>04 DLC\u6d82\u5c42\u7684\u5236\u5907<\/h2>\n<p>PeCVD\u53ef\u5236\u5907\u5404\u7c7b\u578bDLC\u6d82\u5c42\u3002\u5178\u578b\u7684DLC\u6d82\u5c42\u7684\u539a\u5ea6\u4e3a1-2\u5fae\u7c73\uff0cta-C\u57280.5\u03bcm\u4ee5\u4e0b\u3002\u8fd9\u4f7f\u5f97DLC\u6d82\u5c42\u5728\u62b5\u6297\u4e25\u91cd\u78e8\u635f\u6216\u8150\u8680\u65b9\u9762\u8868\u73b0\u4e0d\u4f73\u3002<\/p>\n<p>\u7eb3\u72ee<a href=\"https:\/\/www.naxauie.com\/product\/pecvd-dlc-%E8%87%AA%E6%B6%A6%E6%BB%91%E7%B3%BB%E5%88%97%E7%9C%9F%E7%A9%BA%E9%95%80%E8%86%9C%E6%9C%BA\/\" target=\"_blank\" rel=\"noopener\">P\u7cfb\u5217DLC \u771f\u7a7a\u9540\u819c\u673a<\/a>\u591a\u5c42\u819c\u548c\u8fc7\u6e21\u5c42\u7ed3\u6784\uff0c\u53ef\u4ee5\u5b9e\u73b010\u03bcm\u4ee5\u4e0a\u7684\u8d85\u539aDLC\u590d\u5408\u819c\uff0c\u4ee5\u5927\u5e45\u63d0\u5347DLC\u5bff\u547d\u548c\u819c\u7684\u7ed3\u5408\u529b\u3002\u5728\u4f4e\u4e8e250\u2103\u7684\u9540\u819c\u6e29\u5ea6\u4e0b\uff0cPACVD\u53ef\u4ee5\u6c89\u79ef\u5404\u79cd\u975e\u5bfc\u7535\u548c\u5bfc\u7535\u57fa\u6750\u3002\u7eb3\u72eePACVD\u9540\u819c\u8bbe\u5907\uff0c\u6240\u6c89\u79ef\u6d82\u5c42\u542b\u6709\u5927\u7ea670%\u7684\u65e0\u5b9a\u5f62sp3\u952e\uff0c\u53ef\u6c89\u79ef\u8d85\u786c\u7684ta-C\u6d82\u5c42\u3002\u800cHIPIES\u6280\u672f\u53ef\u8fdb\u4e00\u6b65\u63d0\u5347ta-C\u7684\u6d82\u5c42\u786c\u5ea6\u3002<\/p>\n<p>\u7eb3\u72ee PACVD\u5177\u6709\u8bb8\u591a\u4f18\u70b9\uff1a<\/p>\n<ul>\n<li>\u65e0\u6db2\u6ef4\uff0c\u65e0\u987b\u540e\u671f\u629b\u5149<\/li>\n<li>\u53ef\u5728\u91d1\u5c5e\u3001\u975e\u91d1\u5c5e\u3001\u5851\u6599\u3001\u78b3\u5316\u7845\u9676\u74f7\u7b49\u591a\u79cd\u57fa\u6750\u4e0a\u6c89\u79ef<\/li>\n<li>\u5728\u6709\u6548900mm\u9ad8\u5ea6\u5185\u4fdd\u6301\u826f\u597d\u7684\u819c\u539a\u5747\u4e00\u6027<\/li>\n<li>\u53ef\u4f7f\u7528\u6c14\u4f53\u5de5\u827a\u548c\u8d85\u7eaf\u77f3\u58a8\u9776\uff0c\u5b9e\u73b0\u4e0d\u540c\u6c89\u79ef\u9700\u6c42<\/li>\n<li>\u53cc\u79bb\u5b50\u523b\u8680\u6280\u672f\uff0c\u7528\u4e8e\u6e05\u6d01\u3001\u64e6\u6d17\u6216\u6e85\u5c04\u6e05\u6d01\u4ea7\u54c1\u8868\u9762\uff0c\u5e76\u63d0\u9ad8\u6d82\u5c42\u4e0e\u57fa\u6750\u7684\u9644\u7740\u529b<\/li>\n<\/ul>\n<p>\u7eb3\u72eeP\u7cfb\u5217\u771f\u7a7a\u9540\u819c\u673a\u57fa\u672c\u53c2\u6570\u5982\u4e0b\uff1a<\/p>\n<div class=\"elementor-element elementor-element-0a78157 elementor-widget elementor-widget-text-editor\" data-id=\"0a78157\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n<div class=\"elementor-widget-container\">\n<figure class=\"wp-block-table\">\n<table>\n<tbody>\n<tr>\n<td><\/td>\n<td>P850<\/td>\n<td>P1200<\/td>\n<td>P1600<\/td>\n<\/tr>\n<tr>\n<td>\u7b49\u79bb\u5b50\u4f53\u6709\u6548\u5c3a\u5bf8[mm]<\/td>\n<td>D680x850<\/td>\n<td>D680x1200<\/td>\n<td>D800x1600<\/td>\n<\/tr>\n<tr>\n<td>\u627f\u91cd[kg]<\/td>\n<td>500<\/td>\n<td>800<\/td>\n<td>1200<\/td>\n<\/tr>\n<tr>\n<td>PVD\u00a0\u6280\u672f<\/td>\n<td>CFS\u00a0 \u00a0,\u00a0PECVD<\/td>\n<td>CFS\u00a0 \u00a0,\u00a0PECVD<\/td>\n<td>CFS\u00a0 \u00a0,\u00a0PECVD<\/td>\n<\/tr>\n<tr>\n<td>\u523b\u8680\u6280\u672f<\/td>\n<td>SET<\/td>\n<td>SET<\/td>\n<td>SET<\/td>\n<\/tr>\n<tr>\n<td>\u9634\u6781\u6570\u91cf<\/td>\n<td>4<\/td>\n<td>4<\/td>\n<td>6<\/td>\n<\/tr>\n<tr>\n<td>\u9540\u819c\u65f6\u95f4[h]<\/td>\n<td>10-12h<\/td>\n<td>10-12h<\/td>\n<td>10-12h<\/td>\n<\/tr>\n<tr>\n<td>\u6d82\u5c42\u786c\u5ea6[hv]<\/td>\n<td>1200-2500 \u53ef\u8c03<\/td>\n<td>1200-2500 \u53ef\u8c03<\/td>\n<td>1200-2500 \u53ef\u8c03<\/td>\n<\/tr>\n<tr>\n<td>\u7c97\u7cd9\u5ea6Ra[um]<\/td>\n<td>\uff1c0.05<\/td>\n<td>\uff1c0.05<\/td>\n<td>\uff1c0.05<\/td>\n<\/tr>\n<tr>\n<td>\u5212\u75d5\u7ed3\u5408\u529b[N]<\/td>\n<td>\uff1e30\uff0c\uff1e20<\/td>\n<td>\uff1e30\uff0c\uff1e20<\/td>\n<td>\uff1e30\uff0c\uff1e20<\/td>\n<\/tr>\n<tr>\n<td>\u6d82\u5c42\u79cd\u7c7b<\/td>\n<td>Cr+W-C:H+a-C:H,\u00a0Cr+WC-C:H,<br \/>\nGLC,\u00a0Al-Sn-Cu\uff0cMoS2,\u00a0etc.<\/td>\n<td>Cr+W-C:H+a-C:H,\u00a0Cr+WC-C:H,<br \/>\nGLC,\u00a0Al-Sn-Cu\uff0cMoS2<\/td>\n<td>Cr+W-C:H+a-C:H,\u00a0Cr+WC-C:H,<br \/>\nGLC,\u00a0Al-Sn-Cu\uff0cMoS2<\/td>\n<\/tr>\n<tr>\n<td>\u5360\u5730\u9762\u79efD*W*H\u00a0(mm)<\/td>\n<td>4600x2300x2000<\/td>\n<td>4600x2300x2300<\/td>\n<td>4600x2300x2500<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5176\u5b83\uff1a<\/p>\n<ul>\n<li><a href=\"https:\/\/www.coatingrd.com\/knowledge-base\/pecvd%E5%92%8Cpacvd%E7%AD%89%E7%A6%BB%E5%AD%90%E5%8C%96%E5%AD%A6%E6%B2%89%E7%A7%AF%E6%8A%80%E6%9C%AF\/\" target=\"_blank\" rel=\"noopener\">PECVD\u6216PACVD\u7b49\u79bb\u5b50\u5316\u5b66\u6c89\u79ef\u6280\u672f<\/a><\/li>\n<\/ul>\n<\/figure>\n<\/div>\n<\/div>\n<h2>05 DLC\u78e8\u635f\u6d4b\u8bd5<\/h2>\n<p>\u6839\u636e\u78e8\u635f\u673a\u7406\uff0c\u9009\u62e9\u8868\u9762\u66f4\u5149\u6ed1\u6216\u8005\u57fa\u6750\u66f4\u575a\u786c\uff0c\u90fd\u662f\u51cf\u5c11DLC\u6d82\u5c42\u78e8\u635f\u7387\u7684\u9014\u5f84\u3002\u7684\u6709\u6548\u5728\u9ad8\u901f\u9ad8\u57fa\u7840\u4e0b\uff08\u9ad8\u786c\u5ea6\u57fa\u6750\u4e3a\u6d82\u5c42\u63d0\u4f9b\u652f\u6301\uff09\uff0c\u78e8\u635f\u7387\uff1a2.O X 10<sup>-8<\/sup> mm<sup>3<\/sup>\/N\u00b7m<\/p>\n<h2>06 DLC\u548cCrN\u6d82\u5c42\u51b2\u538b\u6a21\u5177\u6027\u80fd\u6bd4\u8f83<\/h2>\n<p>DLC\u6d82\u5c42\u548cCrN\u6d82\u5c42\u90fd\u5177\u6709\u57282000HV\u5de6\u53f3\u7684\u9ad8\u786c\u5ea6\u3002\u5728\u7eb3\u72ee\u7684\u6a21\u5177\u4e0a\u673a\u6d4b\u8bd5\u4e2d\uff0c\u524d100\u4e2a\u96f6\u4ef6\u6d4b\u8bd5\u4e2d\uff1a<\/p>\n<p>CrN+\u6d82\u5c42\u6ca1\u6709\u78e8\u635f\uff0c\u4f46\u5de5\u4ef6\u51fa\u73b0\u4e86\u78e8\u635f\u3002\u5c40\u90e8\u6469\u64e6\u9020\u6210\u6a21\u5177\u9891\u7e41\u9700\u8981\u6e05\u6d01\uff1b<\/p>\n<p>DLC\u6d82\u5c42\uff0c\u4f1a\u4ea7\u751f\u77f3\u58a8\u5c42\u62e5\u6709\u975e\u5e38\u4f4e\u7684\u6469\u64e6\u7cfb\u6570\uff0cCrN+\u548c\u5de5\u4ef6\u90fd\u6ca1\u6709\u78e8\u635f\uff1b<\/p>\n<h2>07 \u5176\u5b83DLC\u5e38\u89c1\u95ee\u9898<\/h2>\n<ul>\n<li><a class=\"active\" href=\"https:\/\/www.naxau.cn\/docs\/ta-c-dlc%e6%b6%82%e5%b1%82%e5%92%8ctac%e7%a2%b3%e5%8c%96%e9%92%bd%e6%b6%82%e5%b1%82%e7%9a%84%e5%8c%ba%e5%88%ab\/\" target=\"_blank\" rel=\"noopener\">ta-C DLC\u6d82\u5c42\u548cTaC\u78b3\u5316\u94bd\u6d82\u5c42\u7684\u533a\u522b<\/a><\/li>\n<li><a href=\"https:\/\/www.coatingrd.com\/knowledge-base\/dlc%E5%92%8Cpvd%E7%9A%84%E5%85%B3%E7%B3%BB\/\" target=\"_blank\" rel=\"noopener\">DLC\u548cPVD\u7684\u5173\u7cfb<\/a><\/li>\n<li><a href=\"\/docs\/dlc\u6d82\u5c42\u5e38\u89c1\u95ee\u9898\u6c47\u603b\/\" target=\"_blank\" rel=\"noopener\">DLC\u6d82\u5c42\u5e38\u89c1\u95ee\u9898\u6c47\u603b<\/a><\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>01 DLC\u7684\u7eb3\u72ee\u5e38\u89c1\u79cd\u7c7b DLC\uff08DIAMOND-LIKE CARBON\uff09\u7c7b\u91d1\u521a\u77f3\u78b3\u6d82\u5c42\uff0c\u662f\u4e00\u79cdSP3\uff08\u91d1\u521a\u77f3\u7ed3\u6784\uff09\u548cSP2\uff08\u77f3\u58a8\u7ed3\u6784\uff09\u6216\u4e0e\u6c22\u3001\u7845\u3001\u6c1f\u548c\u91d1\u5c5e\u7b49\u5143\u7d20\u6742\u5316\u7684\u4eba\u5de5\u6750\u6599\u3002DLC\u662f\u78b3\u819c\u6750\u6599\u7684\u7edf\u79f0\uff0c\u5b83\u5177\u6709\u9ad8\u786c\u5ea6\u3001\u8010\u8150\u8680\u3001\u4f4e\u6469\u64e6\u3001\u7535\u7edd\u7f18\u7b49\u591a\u79cd\u7279\u6027\uff0c\u5176\u5404\u5f02\u5316\u7684\u6027\u80fd\u53d6\u51b3\u4e8e\u7ed3\u6784\u952e\u7684\u6bd4\u4f8b\u548c\u914d\u4f4d\u952e\u5143\u7d20\u7684\u79cd\u7c7b\u3002 DLC\u5177\u6709\u90e8\u5206\u91d1\u521a\u77f3\u7684\u7279\u6027\uff0c\u6bd4\u5de5\u4e1a\u4e2d\u4f7f\u7528\u7684\u5927\u591a\u6570\u91d1\u5c5e\u6750\u6599\u90fd\u8981\u786c\u3002\u662f\u673a\u68b0\u8bbe\u5907\u4e2d\u6700\u5e38\u7528\u7684\u81ea\u6da6\u6ed1\u6d82\u5c42\u3002 a-C = \u65e0\u6c22\u975e\u6676\u78b3\u819c a-C:H = \u542b\u6c22\u975e\u6676\u78b3\u819c ta-C = \u56db\u9762\u4f53\u65e0\u6c22\u975e\u6676\u78b3\u819c ta-C:H = \u56db\u9762\u4f53\u542b\u6c22\u975e\u6676\u78b3\u819c a-C:X = \u5143\u7d20\u63ba\u6742\u65e0\u6c22\u975e\u6676\u78b3\u819c 02 DLC\u6d82\u5c42\u7684\u5e94\u7528\u548c\u7279\u6027\uff1aNaxau Coating DLC\u53ef\u4ee5\u901a\u8fc7\u8c03\u6574sp3\u3001sp2\u53ca\u5143\u7d20\u63ba\u6742\uff0c\u5b9e\u73b0\u5404\u79cd\u5b9a\u5236\u5316\u529f\u80fd\u6d82\u5c42\u3002 \u9ad8\u786c\u5ea6\uff1a2000HV-6000HV \u4f4e\u6469\u64e6\u7cfb\u6570\uff080.02\u20130.2\uff09 \u9ad8\u8010\u8150\u8680\u6027\uff08\u589e\u52a0\u539a\u5ea6\u3001\u589e\u52a0\u6253\u5e95\u5c42\u53ef\u4ee5\u663e\u8457\u63d0\u5347\u8010\u8150\u8680\u6027\uff09 \u5bf9\u57fa\u6750\u7684\u9644\u7740\u529b\u5f3a \u8010\u5fae\u52a8\u6027 \u7c98\u5408\u8010\u78e8\u6027 \u5e72\u78e8\u635f\u6761\u4ef6\u4e0b\u7684\u81ea\u6da6\u6ed1 \u7ea610 ~100-6 \u03a9\u7edd\u7f18\u6216\u5bfc\u7535\uff0c\u901a\u5e38\u542b\u6c22DLC\u7edd\u7f18 03 DLC\u6d82\u5c42\u5e38\u89c1\u5e94\u7528\uff1a \u94dd\u3001\u94dd\u5408\u91d1\u3001\u7c89\u672b\u51b6\u91d1\u5408\u91d1\u52a0\u5de5\u5200\u5177 \u91d1\u5c5e\u6210\u578b\u6a21\u5177\u3001\u6a61\u80f6\u6a21\u5177\u3001\u5851\u6599\u6ce8\u5851\u6a21\u5177 \u5851\u6599\u548c\u6324\u51fa\u6a21\u5177\uff0c\u5177\u6709\u8010\u78e8\u3001\u8010\u8150\u8680\u3001\u826f\u597d\u7684\u8131\u6a21\u6027\u548c\u6297\u83cc\u6027\u80fd \u6db2\u538b\u90e8\u4ef6\u2014\u2014\u6c14\u7f38\u3001\u6d3b\u585e\u6746\u3001\u9f7f\u8f6e\u6cf5\u3001\u5bfc\u5411\u73af\u3001\u9876\u6746 \u9600\u95e8\u7ec4\u4ef6\u2014\u2014\u7403\u4f53\u3001\u95e8\u95f8\u3001\u7403\u9600\u3001\u6267\u884c\u673a\u6784 \u6c7d\u8f66\u96f6\u90e8\u4ef6\u2014\u2014\u66f2\u8f74\u3001\u51f8\u8f6e\u8f74\u3001\u9f7f\u8f6e\u3001\u8f74\u627f\u3001\u6d3b\u585e\u73af\u3001\u633a\u6746\u3001\u8155\u9500\u3001\u55b7\u6cb9\u5668 \u6cf5\u90e8\u4ef6\u2014\u2014\u53f6\u8f6e\u3001\u6269\u6563\u5668\u3001\u8f6c\u5b50 \u673a\u68b0\u8f74\u5c01 \u96f6\u4ef6\u7edd\u7f18 \u9ad8\u7aef\u9ed1\u8272\u5916\u89c2\u88c5\u9970\u9540\u2014\u2014\u8868\u6846\u3001\u667a\u80fd\u624b\u73af\u7b49\u7a7f\u6234\u8bbe\u5907 04 DLC\u6d82\u5c42\u7684\u5236\u5907 PeCVD\u53ef\u5236\u5907\u5404\u7c7b\u578bDLC\u6d82\u5c42\u3002\u5178\u578b\u7684DLC\u6d82\u5c42\u7684\u539a\u5ea6\u4e3a1-2\u5fae\u7c73\uff0cta-C\u57280.5\u03bcm\u4ee5\u4e0b\u3002\u8fd9\u4f7f\u5f97DLC\u6d82\u5c42\u5728\u62b5\u6297\u4e25\u91cd\u78e8\u635f\u6216\u8150\u8680\u65b9\u9762\u8868\u73b0\u4e0d\u4f73\u3002 \u7eb3\u72eeP\u7cfb\u5217DLC \u771f\u7a7a\u9540\u819c\u673a\u591a\u5c42\u819c\u548c\u8fc7\u6e21\u5c42\u7ed3\u6784\uff0c\u53ef\u4ee5\u5b9e\u73b010\u03bcm\u4ee5\u4e0a\u7684\u8d85\u539aDLC\u590d\u5408\u819c\uff0c\u4ee5\u5927\u5e45\u63d0\u5347DLC\u5bff\u547d\u548c\u819c\u7684\u7ed3\u5408\u529b\u3002\u5728\u4f4e\u4e8e250\u2103\u7684\u9540\u819c\u6e29\u5ea6\u4e0b\uff0cPACVD\u53ef\u4ee5\u6c89\u79ef\u5404\u79cd\u975e\u5bfc\u7535\u548c\u5bfc\u7535\u57fa\u6750\u3002\u7eb3\u72eePACVD\u9540\u819c\u8bbe\u5907\uff0c\u6240\u6c89\u79ef\u6d82\u5c42\u542b\u6709\u5927\u7ea670%\u7684\u65e0\u5b9a\u5f62sp3\u952e\uff0c\u53ef\u6c89\u79ef\u8d85\u786c\u7684ta-C\u6d82\u5c42\u3002\u800cHIPIES\u6280\u672f\u53ef\u8fdb\u4e00\u6b65\u63d0\u5347ta-C\u7684\u6d82\u5c42\u786c\u5ea6\u3002 \u7eb3\u72ee PACVD\u5177\u6709\u8bb8\u591a\u4f18\u70b9\uff1a \u65e0\u6db2\u6ef4\uff0c\u65e0\u987b\u540e\u671f\u629b\u5149 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