{"id":657,"date":"2018-11-28T16:43:34","date_gmt":"2018-11-28T08:43:34","guid":{"rendered":"http:\/\/localhost\/theme20\/?p=657"},"modified":"2023-12-12T09:31:52","modified_gmt":"2023-12-12T01:31:52","slug":"\u043c\u043e\u0449\u043d\u043e\u0435-\u0438\u043c\u043f\u0443\u043b\u044c\u0441\u043d\u043e\u0435-\u043c\u0430\u0433\u043d\u0435\u0442\u0440\u043e\u043d\u043d\u043e\u0435-\u0440\u0430\u0441\u043f","status":"publish","type":"post","link":"https:\/\/www.naxauie.com\/ru\/\u043c\u043e\u0449\u043d\u043e\u0435-\u0438\u043c\u043f\u0443\u043b\u044c\u0441\u043d\u043e\u0435-\u043c\u0430\u0433\u043d\u0435\u0442\u0440\u043e\u043d\u043d\u043e\u0435-\u0440\u0430\u0441\u043f\/","title":{"rendered":"HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04PVD\u6d82\u5c42\u6280\u672f"},"content":{"rendered":"<p>\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HPPMS\uff09\uff0c\u4e5f\u79f0\u4e3a\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HIPIMS\uff09\u662f\u57fa\u4e8e\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u7684PVD\u6d82\u5c42\u6280\u672f\u3002HPPMS\u5229\u7528kW \/ cm <sup>2<\/sup>\u91cf\u7ea7\u7684\u6781\u9ad8\u529f\u7387\u5bc6\u5ea6\u5728\u5c0f\u4e8e10\uff05\u7684\u4f4e\u5360\u7a7a\u6bd4\uff08\u5f00\/\u5173\u65f6\u95f4\u6bd4\uff09\u4e0b\uff0c\u4ee5\u6570\u5341\u5fae\u79d2\u7684\u77ed\u8109\u51b2\uff08\u8109\u51b2\uff09\u4e3a\u5355\u4f4d\u3002HPPMS\u7684\u663e\u7740\u7279\u5f81\u662f\u6e85\u5c04\u91d1\u5c5e\u7684\u9ad8\u5ea6\u7535\u79bb\u548c\u5206\u5b50\u6c14\u4f53\u7684\u9ad8\u89e3\u79bb\u901f\u7387\uff0c\u8fd9\u5bfc\u81f4\u4e86\u6c89\u79ef\u819c\u7684\u9ad8\u5bc6\u5ea6\u3002\u7535\u79bb\u548c\u89e3\u79bb\u5ea6\u6839\u636e\u5cf0\u503c\u9634\u6781\u529f\u7387\u800c\u589e\u52a0\u3002\u8be5\u6781\u9650\u7531\u653e\u7535\u4ece\u8f89\u5149\u5230\u7535\u5f27\u76f8\u7684\u8fc7\u6e21\u786e\u5b9a\u3002\u9009\u62e9\u5cf0\u503c\u529f\u7387\u548c\u5360\u7a7a\u6bd4\uff0c\u4ee5\u4fdd\u6301\u7c7b\u4f3c\u4e8e\u5e38\u89c4\u6e85\u5c04\u7684\u5e73\u5747\u9634\u6781\u529f\u7387\uff081-10 W \/ cm\uff09\u3002<\/p>\n<p>HPPMS\u7528\u4e8e\uff1a<\/p>\n<ul>\n<li>\u5728\u6d82\u5c42\u6c89\u79ef\u4e4b\u524d\u5bf9\u57fa\u5e95\u8fdb\u884c\u7c98\u5408\u529b\u589e\u5f3a\u7684\u9884\u5904\u7406\uff08\u57fa\u5e95\u8680\u523b\uff09<\/li>\n<li>\u6c89\u79ef\u5177\u6709\u9ad8\u5fae\u7ed3\u6784\u5bc6\u5ea6\u7684\u6d82\u5c42<\/li>\n<\/ul>\n<p>HPPMS\u5728\u5f88\u77ed\u7684\u65f6\u95f4\u5185\uff08\u901a\u5e38\u4e3a\u301c100\u03bcs\uff09\u4f7f\u7528\u5411\u9634\u6781\u63d0\u4f9b\u7684\u5927\u80fd\u91cf\u8109\u51b2\u3002\u8fd9\u9700\u8981\u975e\u5e38\u4e0d\u540c\u7c7b\u578b\u7684\u7535\u6e90[1]\u3002HPPMS\u5de5\u827a\u53ef\u5c06\u8f83\u5927\u7684\u4f4e\u80fd\u91cf\u79bb\u5b50\u901a\u91cf\u4f20\u9012\u7ed9\u57fa\u677f\u3002\u7535\u6e90\u5fc5\u987b\u4ea7\u751f\u6700\u9ad83 MW \/\u8109\u51b2\u7684\u5cf0\u503c\u529f\u7387\uff0c\u8109\u51b2\u5bbd\u5ea6\u5728100\u5230150\u03bcs\u4e4b\u95f4\u3002\u5e73\u5747\u529f\u7387\u7ea6\u4e3a20 kW\uff0c\u9891\u7387\u9ad8\u8fbe500 Hz\u3002\u9664\u4e86\u63d0\u4f9b\u8109\u51b2\u529f\u7387\u5916\uff0c\u8fd8\u5fc5\u987b\u8fdb\u884c\u7535\u5f27\u6291\u5236\u3002\u8be5\u8fc7\u7a0b\u5229\u7528\u4e86\u9ad8\u80fd\u91cf\u8109\u51b2\u4ea7\u751f\u7684\u589e\u5f3a\u7535\u79bb\u7684\u4f18\u52bf\u3002\u65bd\u52a0\u81f3\u9776\u6750\u7684\u529f\u7387\u5bc6\u5ea6\u7ea6\u4e3a1 \u2013\u00a03 kW \/ cm\u00a0<sup>2<\/sup>\uff08\u4e0e\u529f\u7387\u5bc6\u5ea6\u7ea6\u4e3a1 \u2013 10 W \/ cm\u00a0<sup>2\u7684<\/sup>\u4f20\u7edf\u78c1\u63a7\u6e85\u5c04\u76f8\u6bd4\uff09[2]\u3002<\/p>\n<p>\u7531\u4e8e\u589e\u5f3a\u7684\u7535\u79bb\u4f5c\u7528\uff0c\u53ef\u4ee5\u4f7f\u7528HPPMS\u6765\u5b8c\u6210\u6676\u4f53\u819c\u7684\u751f\u957f\u4ee5\u53ca\u63a7\u5236\u5176\u76f8\u7ec4\u6210[3]\u3002\u6c89\u79ef\u6761\u4ef6\u540c\u6837\u5f88\u91cd\u8981\uff0c\u4f46\u662f\u7535\u6e90\u7684\u5360\u7a7a\u6bd4\u548c\u7b49\u79bb\u5b50\u4f53\u53c2\u6570\u4f3c\u4e4e\u6709\u52a9\u4e8e\u5f62\u6210\u6676\u4f53\u7ed3\u6784\u3002\u53d1\u73b0TiO\u00a0<sub>2<\/sub>\u7684\u91d1\u7ea2\u77f3\u76f8\u968f\u8109\u51b2\u5468\u671f\u800c\u589e\u52a0\uff0c\u968f\u5bc6\u5ea6\u968f\u8109\u51b2\u5e45\u5ea6\u800c\u964d\u4f4e[3]\u3002\u7136\u800c\uff0c\u5176\u4ed6\u7814\u7a76\u4eba\u5458\u6ca1\u6709\u770b\u5230\u8fd9\u79cd\u73b0\u8c61\uff0c\u4ec5\u83b7\u5f97\u4e86\u975e\u6676\u819c\uff0c\u800c\u6c89\u79ef\u4e86\u9ad8\u7ed3\u6676\u5ea6\u7684\u949b[4]\u3002HPPMS\u5df2\u6c89\u79ef\u4e86\u9ad8\u5ea6\u7ed3\u6676\u7684ITO\u819c\u3002<\/p>\n<p>\u7ed3\u679c\uff0cHPPMS\u6d82\u5c42\u5e94\u5177\u6709\u6539\u5584\u7684\u6469\u64e6\u5b66\uff0c\u5149\u5b66\uff0c\u7535\u5b66\u548c\u73af\u5883\u6027\u80fd\u3002\u6539\u5584\u7684\u5fae\u7ed3\u6784\u4e5f\u6539\u5584\u4e86\u5149\u5b66\u6027\u80fd[3,4,5-9]\u3002\u4f17\u6240\u5468\u77e5\uff0c\u6298\u5c04\u7387\u53d6\u51b3\u4e8e\u5149\u5b66\u6d82\u5c42\u7684\u5bc6\u5ea6\u3002\u5bc6\u5ea6\u8f83\u5c0f\u7684\u6d82\u5c42\u7684\u6298\u5c04\u7387\u901a\u5e38\u4f4e\u4e8e\u5bc6\u5ea6\u8f83\u9ad8\u7684\u6d82\u5c42\u3002TiO <sub>2<\/sub>\u6d82\u5c42\u662f\u4f9d\u8d56\u4e8e\u5bc6\u5ea6\u7684\u5b8c\u7f8e\u4f8b\u5b50\u3002\u8fd9\u79cd\u6750\u6599\u7684\u6298\u5c04\u7387\u53ef\u4ee5\u57282.2 \u2013 2.5\u4e4b\u95f4\u53d8\u5316\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u5bc6\u5ea6\u3002\u636e\u62a5\u9053\uff0c\u4e0e\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u819c\u76f8\u6bd4\uff0c\u7531HPPMS\u6c89\u79ef\u7684\u819c\u5177\u6709\u8f83\u9ad8\u7684\u6298\u5c04\u7387\uff0c\u5982\u56fe1\u6240\u793a[5]\u3002\u5728\u6574\u4e2a\u5149\u8c31\u4e0a\u6298\u5c04\u7387\u8f83\u9ad8\u3002\u8fd9\u4e9b\u6d82\u5c42\u7684\u5bc6\u5ea6\u4e5f\u4e3a3.83 g \/ cm <sup>3<\/sup>DC\u819c\u7684\u5bc6\u5ea6\u4e3a3.71 g \/ cm\u00a0<sup>3<\/sup>\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6\u4e3a1.3 nm\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6\u4ec5\u4e3a0.5 nm\u00a0\u3002\u5982\u679c\u4f7f\u7528\u7535\u6e90\u7684\u6700\u4f73\u5360\u7a7a\u6bd4\uff0c\u5219TiO\u00a0<sub>2\u6d82\u5c42<\/sub>\u7684\u6298\u5c04\u7387\u4e5f\u5f88\u9ad8\uff0c\u7ea6\u4e3a2.72\u00a0[3]\u3002\u6539\u5584SiO\u00a0<sub>2<\/sub>\uff0cZnO\uff0cAl\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>3<\/sub>\uff0cTa\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>5<\/sub>\u548cZrO\u00a0<sub>2\u7684<\/sub>\u5149\u5b66\u6027\u80fd\u7535\u5f71\u4e5f\u6709\u62a5\u9053[6,7,8]\u3002\u8fd9\u4e9b\u7ed3\u679c\u4ee4\u4eba\u5370\u8c61\u6df1\u523b\uff0c\u4f46\u5fc5\u987b\u6ce8\u610f\u67d0\u4e9b\u4e8b\u9879\u3002\u4e0e\u4f7f\u7528\u5176\u4ed6\u7535\u6e90\u6c89\u79ef\u7684\u6d82\u5c42\u76f8\u6bd4\uff0cHPPMS\u6d82\u5c42\u5e76\u4e0d\u603b\u662f\u5177\u6709\u6539\u8fdb\u7684\u6027\u80fd[10]\u3002\u5149\u5b66\u5e38\u6570\u603b\u662f\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u6c89\u79ef\u6761\u4ef6\uff0c\u5e76\u4e14\u5fc5\u987b\u4e3a\u6bcf\u79cd\u6750\u6599\u548c\u6c89\u79ef\u7cfb\u7edf\u786e\u5b9a\u6700\u4f73\u7684\u4e00\u7ec4\u6761\u4ef6\u3002\u6211\u770b\u5230\u5e73\u9762\u78c1\u63a7\u6e85\u5c04\u819c\u4e5f\u62a5\u9053\u4e86\u5f88\u9ad8\u7684\u6298\u5c04\u7387\u3002\u5b9e\u9645\u4e0a\uff0c\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\uff0c\u4e2d\u9891\u78c1\u63a7\u6e85\u5c04\u6bd4HPPMS\u5177\u6709\u66f4\u597d\u7684\u6027\u80fd[8]\u3002<\/p>\n<figure id=\"attachment_290\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-290\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-290\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png\" sizes=\"auto, (max-width: 524px) 100vw, 524px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png 524w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1-300x220.png 300w\" alt=\"\" width=\"524\" height=\"384\" \/><figcaption id=\"caption-attachment-290\" class=\"wp-caption-text\">\u56fe1. HPPMS\u548c\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u819c\u7684\u6298\u5c04\u7387\u6bd4\u8f83[5] 11\u3002<\/figcaption><\/figure>\n<p>HPPMS\u5de5\u827a\u7684\u53e6\u4e00\u4e2a\u4f18\u70b9\u5e94\u8be5\u662f\u6539\u5584\u5316\u5b66\u548c\u73af\u5883\u7a33\u5b9a\u6027\u3002\u94f6\u6d82\u5c42\u56e0\u7f3a\u4e4f\u5316\u5b66\u548c\u73af\u5883\u7a33\u5b9a\u6027\u800c\u81ed\u540d\u662d\u8457\uff0c\u7279\u522b\u662f\u975e\u5e38\u8584\u7684\u6d82\u5c42\u3002\u5c3d\u7ba1\u4ecd\u6709\u8bb8\u591a\u6d4b\u8bd5\u8981\u505a\uff0c\u4f46HPPMS\u6c89\u79ef\u7684\u94f6\u819c\u4f3c\u4e4e\u5728\u591a\u5c42\u7ed3\u6784\u4e2d\u5177\u6709\u66f4\u9ad8\u7684\u7a33\u5b9a\u6027\u548c\u5149\u5b66\u6027\u80fd[9]\u3002<\/p>\n<p>\u968f\u7740\u5bc6\u5ea6\u548c\u5149\u6ed1\u5ea6\u7684\u63d0\u9ad8\uff0c\u8be5\u5de5\u827a\u5177\u6709\u6539\u5584\u6469\u64e6\u6d82\u5c42\u6027\u80fd\u7684\u6f5c\u529b[11-15]\u3002\u5177\u6709\u81f4\u5bc6\u7684\u5fae\u89c2\u7ed3\u6784\u548c\u5149\u6ed1\u8868\u9762\u7684\u6d82\u5c42\u5728\u8bb8\u591a\u5e94\u7528\u4e2d\u662f\u4f18\u9009\u7684\uff0c\u56e0\u4e3a\u5b83\u589e\u52a0\u4e86\u8010\u8150\u8680\u548c\u8010\u78e8\u6027\uff0c\u5e76\u51cf\u5c11\u4e86\u6469\u64e6\u3002\u8bf8\u5982TiN\uff0cCrN <sub>x<\/sub>\uff0cCr\u00a0<sub>x<\/sub>\u00a0N\u00a0<sub>y<\/sub>\u548cTi\u00a0<sub>3<\/sub>\u00a0SiC\u00a0<sub>2\u7684<\/sub>\u786c\u8d28\u6750\u6599\u5747\u5df2\u901a\u8fc7HPPMS\u6c89\u79ef\u3002\u4e0e\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u76f8\u6bd4\uff0cTiN\u6d82\u5c42\u5177\u6709\u975e\u5e38\u7ec6\u7684\u6676\u7c92\u7ed3\u6784[19]\u3002CrN\u6d82\u5c42\u751a\u81f3\u6bd4UBM\u6e85\u5c04\u6d82\u5c42\u5177\u6709\u66f4\u597d\u7684\u5fae\u89c2\u7ed3\u6784\u3002\u636e\u62a5\u9053\u786c\u5ea6\u503c\u63a5\u8fd125 GPa\uff0c\u6ed1\u52a8\u78e8\u635f\u7cfb\u6570\u4ece7\u964d\u4f4e\u52300.2 [15]\u3002<\/p>\n<p>HPePMS\u8fd8\u6c89\u79ef\u4e86VMeCN\u548cCrN \/ NbN\u6469\u64e6\u8d85\u6676\u683c\u6d82\u5c42[16,17]\u3002\u8fd9\u4e9b\u7ed3\u6784\u663e\u793a\u51fa\u65b0\u7684\u9ad8\u786c\u5ea6\u503c\u548c\u4f4eCOF\u3002TiAlCN \/ VCN\u8d85\u6676\u683c\u663e\u793a\u51fa\u8f83\u9ad8\u7684\u786c\u5ea6\u503c\uff08Hv = 2900 kg \/ mm\u00a0<sup>2<\/sup>\uff09\u548c0.42\u7684\u4e2d\u7b49\u8f83\u4f4e\u7684COF\u3002CrN \/ NbN\u6d82\u5c42\u663e\u793a\u51fa\u589e\u5f3a\u7684\u8010\u78e8\u6027\u548c\u8150\u8680\u4fdd\u62a4\u6027\u4ee5\u53ca\u8f83\u4f4e\u7684\u8868\u9762\u7c97\u7cd9\u5ea6[16]\u3002\u8be5\u8fc7\u7a0b\u4e2d\u7684\u4e00\u4e2a\u91cd\u8981\u6b65\u9aa4\u662f\u7528HPPMS\u6c89\u79ef\u7684V\u548cNb\u9884\u5904\u7406\u57fa\u6750\u3002<\/p>\n<p>\u51e0\u79cd\u8d44\u6e90\u6307\u51faHPPMS\u819c\u5e94\u5177\u6709\u8f83\u4f4e\u7684\u673a\u68b0\u5e94\u529b[17]\u3002\u867d\u7136\u5e94\u529b\u7684\u6d4b\u91cf\u7ed3\u679c\u4e0d\u5145\u5206\uff0c\u4f46\u636e\u62a5\u9053CrN\u6d82\u5c42\u7684\u5e94\u529b\u57283GPa\u9644\u8fd1[15] 23\u3002\u5728\u78b3\u819c\u4e2d\u6d4b\u5f97\u7684\u5e94\u529b\u8303\u56f4\u4e3a1.6 GPa\u81f36.5 GPa [18]\u3002\u5728TiN\u6d82\u5c42\u4e2d\u4e5f\u6d4b\u5f97\u4e86\u4f4e\u5e94\u529b[19,20]\u3002<\/p>\n<p>HPPMS\u5df2\u88ab\u7528\u4e8e\u6c89\u79ef\u4f4e\u7535\u963b\u7387\u7684ITO\u819c[21]\uff0c\u5e76\u663e\u793a\u51fa\u6709\u671b\u603b\u4f53\u4e0a\u6539\u5584TCO\u7684\u6027\u80fd\u3002ZnO\uff1aAl\u819c\u4e5f\u5df2\u901a\u8fc7\u6b64\u8fc7\u7a0b\u6c89\u79ef\u3002\u51e0\u4e4e\u6240\u6709\u76f8\u5173\u62a5\u544a\u90fd\u5c06HPPMS\u6d82\u5c42\u4e0eDC\u78c1\u63a7\u6e85\u5c04\u6d82\u5c42\u8fdb\u884c\u4e86\u6bd4\u8f83\u3002\u56fe2\u6bd4\u8f83\u4e86HPPMS\u548c\u5728300 C\u4e0b\u6c89\u79ef\u7684DC\u6e85\u5c04\u819c\u7684\u8868\u9762\u5f62\u6001[22]\u3002\u518d\u6b21\u6ce8\u610fHPPMS\u819c\u7684\u8868\u9762\u975e\u5e38\u5149\u6ed1\u3002\u56fe3\u6bd4\u8f83\u4e86\u4e24\u79cd\u65b9\u6cd5\uff089a \u2013 DC\u548c9b \u2013 HPPMS\uff09\u6c89\u79ef\u7684\u7535\u963b\u7387\u819c\u3002\u5728\u4e00\u4e2aO\u7531DC\u65b9\u6cd5\u6765\u5b9e\u73b0\u7684\u7535\u963b\u7387<sub>2<\/sub>\u4e3a1sccm\u7684\u6d41\u91cf\u4e3a\u301c3.2\u00d710\u00a0<sup>-3<\/sup>\u00a0\u03a9.cm\uff08\u5728\u672c\u9886\u57dfITO\u7684\u7edd\u5bf9\u72b6\u6001\uff09\uff0c\u800cHPPMS\u65b9\u6cd5\u7684\u7535\u963b\u7387\u662f3.1\u301c\u00d710\u00a0<sup>-3<\/sup>\u00a0\u03a9.cm\u4e3a\u76f8\u540c\u7684O\u00a0<sub>2<\/sub>\u6d41\u3002\u4f5c\u8005\u8ba4\u4e3a\u8fd9\u662f\u4e00\u4e2a\u5f88\u5927\u7684\u5dee\u5f02\uff0c\u7535\u963b\u7387\u6700\u4f4e\u62a5\u9053\u7684\u503c\u662f1.35\u00d710 <sup>-3<\/sup>\u00a0\u03a9.cm\u76f4\u6d41\u819c\u548c\u301c1.25 X10\u00a0<sup>-3<\/sup> \u03a9.cm\u4e3aHPPMS\u819c\u3002HPPMS\u7684\u771f\u6b63\u4f18\u52bf\u4f3c\u4e4e\u5728\u4e8e\u6d82\u5c42\u7684\u5149\u6ed1\u5ea6\uff0c\u800cHPPMS\u8d62\u5f97\u4e86\u4eba\u4eec\u7684\u9752\u7750\u3002<\/p>\n<figure id=\"attachment_291\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-291\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-866 size-full\" src=\"https:\/\/www.naxau.cn\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04.png\" alt=\"\u76f4\u6d41\u78c1\u63a7\u7ba1\uff08a\uff09\u548cHPPMS\uff08b\uff09\u6c89\u79ef\u7684ITO\u819c\u7684\u8868\u9762\u5f62\u6001\u6bd4\u8f83\" width=\"654\" height=\"484\" srcset=\"https:\/\/www.naxauie.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04.png 654w, https:\/\/www.naxauie.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04-300x222.png 300w\" sizes=\"auto, (max-width: 654px) 100vw, 654px\" \/><figcaption id=\"caption-attachment-291\" class=\"wp-caption-text\">\u56fe2.\u7531\u76f4\u6d41\u78c1\u63a7\u7ba1\uff08a\uff09\u548cHPPMS\uff08b\uff09\u6c89\u79ef\u7684ITO\u819c\u7684\u8868\u9762\u5f62\u6001\u6bd4\u8f83[22]\u3002<\/figcaption><\/figure>\n<figure id=\"attachment_292\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-292\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-292\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3.png\" sizes=\"auto, (max-width: 612px) 100vw, 612px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3.png 612w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3-300x259.png 300w\" alt=\"\" width=\"612\" height=\"528\" \/><figcaption id=\"caption-attachment-292\" class=\"wp-caption-text\">\u56fe3.\u7531\u76f4\u6d41\u78c1\u63a7\u7ba1\uff08a\uff09\u548cHPPMS\uff08b\uff09\u6c89\u79ef\u7684ITO\u819c\u7684\u7535\u963b\u7387\u548c\u5149\u5438\u6536\u7387\u7684\u6bd4\u8f83[22]\u3002<\/figcaption><\/figure>\n<hr \/>\n<p>\u8f6c\u81f3http:\/\/vtcmagblog.com\/<\/p>\n<h3>\u53c2\u8003\uff1a<\/h3>\n<ol>\n<li>D J Christie et al., 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 113.<\/li>\n<li>William D. Sproul, 50 years of Vacuum Coating Technology and the growth of the Society of Vacuum Coaters, Donald M. Mattox and Vivienne Harwood Mattox ed., Society of Vacuum Coaters (2007) 35.<\/li>\n<li>R Bandorf et al., 50th Annual Technical Conference of the Society of Vacuum Coaters (2007) 160.<\/li>\n<li>J A Davis et al., 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 215.<\/li>\n<li>K Sarakinos et al., Rev. Adv. Mater. Sci, 15 (2007) 44.<\/li>\n<li>S Konstantinidis et al., 50th Annual Technical Conference of the Society of Vacuum Coaters (2007) 92.<\/li>\n<li>W.D. Sproul, D.J. Christie, and D.C. Carter, 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 96.<\/li>\n<li>D A Glocker et al, Proceedings of the 48th Technical Conference of the Society of Vacuum Coaters (2005) 53.<\/li>\n<li>J Li, S R Kirkpatrick and S L Rohde, Presentation SE-TuA1, AVS 2007 Fall Technical Conference, October 14 \u2013 19, 2007, Seattle WA.<\/li>\n<li>D A Glocker et al., 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 183<\/li>\n<li>A P Ehiasarian et al., Proceedings of the 45th Technical Conference of the Society of Vacuum Coaters (2002) 328.<\/li>\n<li>J B\u00f6hlmark et al., Proceedings of the 49th Technical Conference of the Society of Vacuum Coaters (2006) 334.<\/li>\n<li>J Alami et al., Thin Solid Films 515 (4): 1731\u20131736.<\/li>\n<li>A P Ehiasarian et al., Surface and Coatings Technology 163-164: 267-272.<\/li>\n<li>J Paulitsch et al., Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 150.<\/li>\n<li>A P Ehiasarian et al, Proceedings of the 49th Technical Conference of the Society of Vacuum Coaters (2006) 349.<\/li>\n<li>W D Sproul, Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 591<\/li>\n<li>B M DeKoven et al. Proceedings of the 46th Technical Conference of the Society of Vacuum Coaters (2003) 158<\/li>\n<li>SE+PS-MoA1: R. Chistyakov, \u201cModulated Pulse Power Deposition ofNanometer-Scale Multilayered Coatings\u201d, presented at the 2008 AVS Fall Technical Conference, Seattle, WA, October 21, 2008.<\/li>\n<li>SE+PS-MoA3: A. Amassian et al., presented at the 2008 AVS Fall Technical Conference, Seattle, WA, October 21, 2008.<\/li>\n<li>P Eh Hovsepian et al., Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 602.<\/li>\n<li>V Sittinger et al., Proceedings of the 49th Technical Conference of the Society of Vacuum Coaters (2006) 343.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HPPMS\uff09\uff0c\u4e5f\u79f0\u4e3a\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HIPIMS\uff09\u662f\u57fa\u4e8e\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u7684PVD\u6d82\u5c42\u6280\u672f\u3002HPPMS\u5229\u7528kW \/ cm 2\u91cf\u7ea7\u7684\u6781\u9ad8\u529f\u7387\u5bc6\u5ea6\u5728\u5c0f\u4e8e10\uff05\u7684\u4f4e\u5360\u7a7a\u6bd4\uff08\u5f00\/\u5173\u65f6\u95f4\u6bd4\uff09\u4e0b\uff0c\u4ee5\u6570\u5341\u5fae\u79d2\u7684\u77ed\u8109\u51b2\uff08\u8109\u51b2\uff09\u4e3a\u5355\u4f4d\u3002HPPMS\u7684\u663e\u7740\u7279\u5f81\u662f\u6e85\u5c04\u91d1\u5c5e\u7684\u9ad8\u5ea6\u7535\u79bb\u548c\u5206\u5b50\u6c14\u4f53\u7684\u9ad8\u89e3\u79bb\u901f\u7387\uff0c\u8fd9\u5bfc\u81f4\u4e86\u6c89\u79ef\u819c\u7684\u9ad8\u5bc6\u5ea6\u3002\u7535\u79bb\u548c\u89e3\u79bb\u5ea6\u6839\u636e\u5cf0\u503c\u9634\u6781\u529f\u7387\u800c\u589e\u52a0\u3002\u8be5\u6781\u9650\u7531\u653e\u7535\u4ece\u8f89\u5149\u5230\u7535\u5f27\u76f8\u7684\u8fc7\u6e21\u786e\u5b9a\u3002\u9009\u62e9\u5cf0\u503c\u529f\u7387\u548c\u5360\u7a7a\u6bd4\uff0c\u4ee5\u4fdd\u6301\u7c7b\u4f3c\u4e8e\u5e38\u89c4\u6e85\u5c04\u7684\u5e73\u5747\u9634\u6781\u529f\u7387\uff081-10 W \/ cm\uff09\u3002 HPPMS\u7528\u4e8e\uff1a \u5728\u6d82\u5c42\u6c89\u79ef\u4e4b\u524d\u5bf9\u57fa\u5e95\u8fdb\u884c\u7c98\u5408\u529b\u589e\u5f3a\u7684\u9884\u5904\u7406\uff08\u57fa\u5e95\u8680\u523b\uff09 \u6c89\u79ef\u5177\u6709\u9ad8\u5fae\u7ed3\u6784\u5bc6\u5ea6\u7684\u6d82\u5c42 HPPMS\u5728\u5f88\u77ed\u7684\u65f6\u95f4\u5185\uff08\u901a\u5e38\u4e3a\u301c100\u03bcs\uff09\u4f7f\u7528\u5411\u9634\u6781\u63d0\u4f9b\u7684\u5927\u80fd\u91cf\u8109\u51b2\u3002\u8fd9\u9700\u8981\u975e\u5e38\u4e0d\u540c\u7c7b\u578b\u7684\u7535\u6e90[1]\u3002HPPMS\u5de5\u827a\u53ef\u5c06\u8f83\u5927\u7684\u4f4e\u80fd\u91cf\u79bb\u5b50\u901a\u91cf\u4f20\u9012\u7ed9\u57fa\u677f\u3002\u7535\u6e90\u5fc5\u987b\u4ea7\u751f\u6700\u9ad83 MW \/\u8109\u51b2\u7684\u5cf0\u503c\u529f\u7387\uff0c\u8109\u51b2\u5bbd\u5ea6\u5728100\u5230150\u03bcs\u4e4b\u95f4\u3002\u5e73\u5747\u529f\u7387\u7ea6\u4e3a20 kW\uff0c\u9891\u7387\u9ad8\u8fbe500 Hz\u3002\u9664\u4e86\u63d0\u4f9b\u8109\u51b2\u529f\u7387\u5916\uff0c\u8fd8\u5fc5\u987b\u8fdb\u884c\u7535\u5f27\u6291\u5236\u3002\u8be5\u8fc7\u7a0b\u5229\u7528\u4e86\u9ad8\u80fd\u91cf\u8109\u51b2\u4ea7\u751f\u7684\u589e\u5f3a\u7535\u79bb\u7684\u4f18\u52bf\u3002\u65bd\u52a0\u81f3\u9776\u6750\u7684\u529f\u7387\u5bc6\u5ea6\u7ea6\u4e3a1 \u2013\u00a03 kW \/ cm\u00a02\uff08\u4e0e\u529f\u7387\u5bc6\u5ea6\u7ea6\u4e3a1 \u2013 10 W \/ cm\u00a02\u7684\u4f20\u7edf\u78c1\u63a7\u6e85\u5c04\u76f8\u6bd4\uff09[2]\u3002 \u7531\u4e8e\u589e\u5f3a\u7684\u7535\u79bb\u4f5c\u7528\uff0c\u53ef\u4ee5\u4f7f\u7528HPPMS\u6765\u5b8c\u6210\u6676\u4f53\u819c\u7684\u751f\u957f\u4ee5\u53ca\u63a7\u5236\u5176\u76f8\u7ec4\u6210[3]\u3002\u6c89\u79ef\u6761\u4ef6\u540c\u6837\u5f88\u91cd\u8981\uff0c\u4f46\u662f\u7535\u6e90\u7684\u5360\u7a7a\u6bd4\u548c\u7b49\u79bb\u5b50\u4f53\u53c2\u6570\u4f3c\u4e4e\u6709\u52a9\u4e8e\u5f62\u6210\u6676\u4f53\u7ed3\u6784\u3002\u53d1\u73b0TiO\u00a02\u7684\u91d1\u7ea2\u77f3\u76f8\u968f\u8109\u51b2\u5468\u671f\u800c\u589e\u52a0\uff0c\u968f\u5bc6\u5ea6\u968f\u8109\u51b2\u5e45\u5ea6\u800c\u964d\u4f4e[3]\u3002\u7136\u800c\uff0c\u5176\u4ed6\u7814\u7a76\u4eba\u5458\u6ca1\u6709\u770b\u5230\u8fd9\u79cd\u73b0\u8c61\uff0c\u4ec5\u83b7\u5f97\u4e86\u975e\u6676\u819c\uff0c\u800c\u6c89\u79ef\u4e86\u9ad8\u7ed3\u6676\u5ea6\u7684\u949b[4]\u3002HPPMS\u5df2\u6c89\u79ef\u4e86\u9ad8\u5ea6\u7ed3\u6676\u7684ITO\u819c\u3002 \u7ed3\u679c\uff0cHPPMS\u6d82\u5c42\u5e94\u5177\u6709\u6539\u5584\u7684\u6469\u64e6\u5b66\uff0c\u5149\u5b66\uff0c\u7535\u5b66\u548c\u73af\u5883\u6027\u80fd\u3002\u6539\u5584\u7684\u5fae\u7ed3\u6784\u4e5f\u6539\u5584\u4e86\u5149\u5b66\u6027\u80fd[3,4,5-9]\u3002\u4f17\u6240\u5468\u77e5\uff0c\u6298\u5c04\u7387\u53d6\u51b3\u4e8e\u5149\u5b66\u6d82\u5c42\u7684\u5bc6\u5ea6\u3002\u5bc6\u5ea6\u8f83\u5c0f\u7684\u6d82\u5c42\u7684\u6298\u5c04\u7387\u901a\u5e38\u4f4e\u4e8e\u5bc6\u5ea6\u8f83\u9ad8\u7684\u6d82\u5c42\u3002TiO 2\u6d82\u5c42\u662f\u4f9d\u8d56\u4e8e\u5bc6\u5ea6\u7684\u5b8c\u7f8e\u4f8b\u5b50\u3002\u8fd9\u79cd\u6750\u6599\u7684\u6298\u5c04\u7387\u53ef\u4ee5\u57282.2 \u2013 2.5\u4e4b\u95f4\u53d8\u5316\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u5bc6\u5ea6\u3002\u636e\u62a5\u9053\uff0c\u4e0e\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u819c\u76f8\u6bd4\uff0c\u7531HPPMS\u6c89\u79ef\u7684\u819c\u5177\u6709\u8f83\u9ad8\u7684\u6298\u5c04\u7387\uff0c\u5982\u56fe1\u6240\u793a[5]\u3002\u5728\u6574\u4e2a\u5149\u8c31\u4e0a\u6298\u5c04\u7387\u8f83\u9ad8\u3002\u8fd9\u4e9b\u6d82\u5c42\u7684\u5bc6\u5ea6\u4e5f\u4e3a3.83 g \/ cm 3DC\u819c\u7684\u5bc6\u5ea6\u4e3a3.71 g \/ cm\u00a03\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6\u4e3a1.3 nm\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6\u4ec5\u4e3a0.5 nm\u00a0\u3002\u5982\u679c\u4f7f\u7528\u7535\u6e90\u7684\u6700\u4f73\u5360\u7a7a\u6bd4\uff0c\u5219TiO\u00a02\u6d82\u5c42\u7684\u6298\u5c04\u7387\u4e5f\u5f88\u9ad8\uff0c\u7ea6\u4e3a2.72\u00a0[3]\u3002\u6539\u5584SiO\u00a02\uff0cZnO\uff0cAl\u00a02\u00a0O\u00a03\uff0cTa\u00a02\u00a0O\u00a05\u548cZrO\u00a02\u7684\u5149\u5b66\u6027\u80fd\u7535\u5f71\u4e5f\u6709\u62a5\u9053[6,7,8]\u3002\u8fd9\u4e9b\u7ed3\u679c\u4ee4\u4eba\u5370\u8c61\u6df1\u523b\uff0c\u4f46\u5fc5\u987b\u6ce8\u610f\u67d0\u4e9b\u4e8b\u9879\u3002\u4e0e\u4f7f\u7528\u5176\u4ed6\u7535\u6e90\u6c89\u79ef\u7684\u6d82\u5c42\u76f8\u6bd4\uff0cHPPMS\u6d82\u5c42\u5e76\u4e0d\u603b\u662f\u5177\u6709\u6539\u8fdb\u7684\u6027\u80fd[10]\u3002\u5149\u5b66\u5e38\u6570\u603b\u662f\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u6c89\u79ef\u6761\u4ef6\uff0c\u5e76\u4e14\u5fc5\u987b\u4e3a\u6bcf\u79cd\u6750\u6599\u548c\u6c89\u79ef\u7cfb\u7edf\u786e\u5b9a\u6700\u4f73\u7684\u4e00\u7ec4\u6761\u4ef6\u3002\u6211\u770b\u5230\u5e73\u9762\u78c1\u63a7\u6e85\u5c04\u819c\u4e5f\u62a5\u9053\u4e86\u5f88\u9ad8\u7684\u6298\u5c04\u7387\u3002\u5b9e\u9645\u4e0a\uff0c\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\uff0c\u4e2d\u9891\u78c1\u63a7\u6e85\u5c04\u6bd4HPPMS\u5177\u6709\u66f4\u597d\u7684\u6027\u80fd[8]\u3002 \u56fe1. HPPMS\u548c\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u819c\u7684\u6298\u5c04\u7387\u6bd4\u8f83[5] 11\u3002 HPPMS\u5de5\u827a\u7684\u53e6\u4e00\u4e2a\u4f18\u70b9\u5e94\u8be5\u662f\u6539\u5584\u5316\u5b66\u548c\u73af\u5883\u7a33\u5b9a\u6027\u3002\u94f6\u6d82\u5c42\u56e0\u7f3a\u4e4f\u5316\u5b66\u548c\u73af\u5883\u7a33\u5b9a\u6027\u800c\u81ed\u540d\u662d\u8457\uff0c\u7279\u522b\u662f\u975e\u5e38\u8584\u7684\u6d82\u5c42\u3002\u5c3d\u7ba1\u4ecd\u6709\u8bb8\u591a\u6d4b\u8bd5\u8981\u505a\uff0c\u4f46HPPMS\u6c89\u79ef\u7684\u94f6\u819c\u4f3c\u4e4e\u5728\u591a\u5c42\u7ed3\u6784\u4e2d\u5177\u6709\u66f4\u9ad8\u7684\u7a33\u5b9a\u6027\u548c\u5149\u5b66\u6027\u80fd[9]\u3002 \u968f\u7740\u5bc6\u5ea6\u548c\u5149\u6ed1\u5ea6\u7684\u63d0\u9ad8\uff0c\u8be5\u5de5\u827a\u5177\u6709\u6539\u5584\u6469\u64e6\u6d82\u5c42\u6027\u80fd\u7684\u6f5c\u529b[11-15]\u3002\u5177\u6709\u81f4\u5bc6\u7684\u5fae\u89c2\u7ed3\u6784\u548c\u5149\u6ed1\u8868\u9762\u7684\u6d82\u5c42\u5728\u8bb8\u591a\u5e94\u7528\u4e2d\u662f\u4f18\u9009\u7684\uff0c\u56e0\u4e3a\u5b83\u589e\u52a0\u4e86\u8010\u8150\u8680\u548c\u8010\u78e8\u6027\uff0c\u5e76\u51cf\u5c11\u4e86\u6469\u64e6\u3002\u8bf8\u5982TiN\uff0cCrN x\uff0cCr\u00a0x\u00a0N\u00a0y\u548cTi\u00a03\u00a0SiC\u00a02\u7684\u786c\u8d28\u6750\u6599\u5747\u5df2\u901a\u8fc7HPPMS\u6c89\u79ef\u3002\u4e0e\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u76f8\u6bd4\uff0cTiN\u6d82\u5c42\u5177\u6709\u975e\u5e38\u7ec6\u7684\u6676\u7c92\u7ed3\u6784[19]\u3002CrN\u6d82\u5c42\u751a\u81f3\u6bd4UBM\u6e85\u5c04\u6d82\u5c42\u5177\u6709\u66f4\u597d\u7684\u5fae\u89c2\u7ed3\u6784\u3002\u636e\u62a5\u9053\u786c\u5ea6\u503c\u63a5\u8fd125 GPa\uff0c\u6ed1\u52a8\u78e8\u635f\u7cfb\u6570\u4ece7\u964d\u4f4e\u52300.2 [15]\u3002 HPePMS\u8fd8\u6c89\u79ef\u4e86VMeCN\u548cCrN \/ NbN\u6469\u64e6\u8d85\u6676\u683c\u6d82\u5c42[16,17]\u3002\u8fd9\u4e9b\u7ed3\u6784\u663e\u793a\u51fa\u65b0\u7684\u9ad8\u786c\u5ea6\u503c\u548c\u4f4eCOF\u3002TiAlCN \/ VCN\u8d85\u6676\u683c\u663e\u793a\u51fa\u8f83\u9ad8\u7684\u786c\u5ea6\u503c\uff08Hv = 2900 kg \/ [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":866,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":false,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":false,"footnotes":""},"categories":[6,1],"tags":[46,32,47],"class_list":["post-657","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-coating-technology-and-equipments","category-lastest-news","tag-hppms","tag-pvd-coating-3","tag-vacuum-coating-2"],"metadata":{"catce":["sidebar-widgets4"],"tabtitle":["\u4ea7\u54c1\u63a8\u8350|\u76f8\u5173\u52a8\u6001"],"noprocd":["yes"],"tabs1":["[listpost type=\"2\" cat=\"class-center\" nb=\"15\"]"],"views":["4759"],"tabs2":["[listpost type=\"1 cat=\"news\" nb=\"8\"]"],"_wp_old_slug":["%e6%a1%88%e4%be%8b%e5%89%96%e6%9e%90%ef%bc%9a%e6%ac%a7%e7%9b%9f%e5%9b%bd%e9%99%85%e8%b4%b8%e6%98%93%e7%94%b3%e8%af%89%e5%81%9c%e4%b8%8b%e5%92%8c%e8%a7%a3%e5%8d%8f%e8%ae%ae%e7%ad%be%e8%ae%a2-8","%e6%a1%88%e4%be%8b%e5%89%96%e6%9e%90%ef%bc%9a%e6%b5%81%e6%b0%b4%e7%ba%bf%e8%bd%a6%e9%97%b4%e8%ae%be%e5%a4%87%e9%85%8d%e7%bd%ae%e5%ae%89%e8%a3%85-2"],"_dp_original":["560"],"_edit_lock":["1631772017:1"],"_edit_last":["1"],"_thumbnail_id":["866"],"_wp_old_date":["2020-03-28"],"_headinfo":["a:1:{i:0;a:24:{s:6:\"module\";s:1:\"1\";s:7:\"navtext\";i:15;s:4:\"navb\";b:1;s:5:\"navpd\";i:18;s:5:\"navc1\";s:7:\"#ffffff\";s:5:\"navc2\";s:7:\"#ffffff\";s:5:\"navc3\";s:7:\"#ffffff\";s:5:\"navc4\";s:7:\"#fbfbfb\";s:5:\"navc5\";s:7:\"#000000\";s:5:\"navc6\";i:25;s:5:\"topc1\";s:7:\"#ffffff\";s:5:\"topc2\";s:7:\"#2ba8db\";s:4:\"topf\";i:12;s:6:\"seach1\";s:0:\"\";s:6:\"seach2\";s:0:\"\";s:3:\"sub\";i:209;s:8:\"searchbl\";i:5;s:6:\"navlib\";b:1;s:8:\"subhight\";i:550;s:8:\"submoshi\";s:0:\"\";s:9:\"navheight\";i:75;s:6:\"shadow\";i:0;s:5:\"sicon\";s:7:\"#ffffff\";s:7:\"search1\";s:7:\"#2b2b2b\";}}"],"_top_left_txt1":["a:1:{i:0;a:3:{s:4:\"text\";s:81:\"  Welcome to visit!  we\u2019ve built a culture of service, teamwork, and innovation\";s:3:\"url\";s:29:\"https:\/\/www.themepark.com.cn\/\";s:4:\"icon\";s:16:\"fab fa-wordpress\";}}"],"_top_left_txt2":["a:3:{i:0;a:3:{s:4:\"text\";s:9:\"DOWNLIOAD\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:28:\"fas fa-chevron-circle-right \";}i:1;a:3:{s:4:\"text\";s:3:\"FAQ\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:28:\"fas fa-chevron-circle-right \";}i:2;a:3:{s:4:\"text\";s:5:\"ABOUT\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:28:\"fas fa-chevron-circle-right \";}}"],"_icontext":["a:3:{i:0;a:5:{s:5:\"title\";s:18:\"\u514d\u8d39\u54a8\u8be2\u7535\u8bdd\";s:4:\"text\";s:12:\"400-123-4567\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:14:\"fas fa-headset\";s:5:\"color\";s:7:\"#2ba8db\";}i:1;a:5:{s:5:\"title\";s:12:\"\u8054\u7cfb\u6211\u4eec\";s:4:\"text\";s:12:\"198-999-4584\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:18:\"fas fa-paper-plane\";s:5:\"color\";s:7:\"#2ba8db\";}i:2;a:5:{s:5:\"title\";s:12:\"\u8d28\u91cf\u4fdd\u8bc1\";s:4:\"text\";s:18:\"\u5341\u5e74\u8d28\u4fdd\u8ba1\u5212\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:18:\"fa fa-pencil-ruler\";s:5:\"color\";s:7:\"#f1a433\";}}"],"_optop":["100"],"_dropbcolor":["#ffffff"],"_droptcolor":["#0f0f0f"],"_droptcolor2":["#146ba2"],"_droptcolor3":["#146ba2"],"_droplogo":["a:1:{i:0;a:36:{s:2:\"id\";i:232;s:5:\"title\";s:6:\"logod2\";s:7:\"caption\";s:0:\"\";s:11:\"description\";s:0:\"\";s:3:\"url\";s:88:\"http:\/\/data.themepark.com.cn\/2021\/n\/smartenterprise_data\/qy20\/uploads\/2023\/10\/logod2.png\";s:8:\"filename\";s:10:\"logod2.png\";s:4:\"link\";s:42:\"http:\/\/themetest3.local\/?attachment_id=232\";s:3:\"alt\";s:0:\"\";s:6:\"author\";s:1:\"1\";s:4:\"name\";s:6:\"logod2\";s:6:\"status\";s:7:\"inherit\";s:10:\"uploadedTo\";i:13;s:4:\"date\";i:1698398427000;s:8:\"modified\";i:1698398427000;s:9:\"menuOrder\";i:0;s:4:\"mime\";s:9:\"image\/png\";s:4:\"type\";s:5:\"image\";s:7:\"subtype\";s:3:\"png\";s:4:\"icon\";s:60:\"http:\/\/themetest3.local\/wp-includes\/images\/media\/default.png\";s:13:\"dateFormatted\";s:17:\"2023\u5e7410\u670827\u65e5\";s:6:\"nonces\";a:3:{s:6:\"update\";s:10:\"6970ecc2b8\";s:6:\"delete\";s:10:\"cdbbc04058\";s:4:\"edit\";s:10:\"feebb14a01\";}s:8:\"editLink\";s:62:\"http:\/\/themetest3.local\/wp-admin\/post.php?post=232&action=edit\";s:4:\"meta\";b:0;s:10:\"authorName\";s:5:\"admin\";s:10:\"authorLink\";s:44:\"http:\/\/themetest3.local\/wp-admin\/profile.php\";s:15:\"uploadedToTitle\";s:18:\"\u7f51\u7ad9\u5934\u90e8\u6a21\u677f\";s:14:\"uploadedToLink\";s:61:\"http:\/\/themetest3.local\/wp-admin\/post.php?post=13&action=edit\";s:15:\"filesizeInBytes\";i:6598;s:21:\"filesizeHumanReadable\";s:4:\"6 KB\";s:7:\"context\";s:0:\"\";s:6:\"height\";i:133;s:5:\"width\";i:330;s:11:\"orientation\";s:9:\"landscape\";s:5:\"sizes\";a:3:{s:9:\"thumbnail\";a:4:{s:6:\"height\";i:133;s:5:\"width\";i:150;s:3:\"url\";s:96:\"http:\/\/data.themepark.com.cn\/2021\/n\/smartenterprise_data\/qy20\/uploads\/2023\/10\/logod2-150x133.png\";s:11:\"orientation\";s:9:\"landscape\";}s:6:\"medium\";a:4:{s:6:\"height\";i:121;s:5:\"width\";i:300;s:3:\"url\";s:96:\"http:\/\/data.themepark.com.cn\/2021\/n\/smartenterprise_data\/qy20\/uploads\/2023\/10\/logod2-300x121.png\";s:11:\"orientation\";s:9:\"landscape\";}s:4:\"full\";a:4:{s:3:\"url\";s:88:\"http:\/\/data.themepark.com.cn\/2021\/n\/smartenterprise_data\/qy20\/uploads\/2023\/10\/logod2.png\";s:6:\"height\";i:133;s:5:\"width\";i:330;s:11:\"orientation\";s:9:\"landscape\";}}s:6:\"compat\";a:2:{s:4:\"item\";s:0:\"\";s:4:\"meta\";s:0:\"\";}s:9:\"uploading\";b:0;}}"],"_headinfotop":[""],"_logoimg":["a:1:{i:0;a:36:{s:9:\"uploading\";b:0;s:4:\"date\";i:1698398331000;s:8:\"filename\";s:25:\"\u7eb3\u72ee\u82f1\u6587logo_2023.png\";s:9:\"menuOrder\";i:0;s:10:\"uploadedTo\";i:13;s:4:\"type\";s:5:\"image\";s:7:\"subtype\";s:3:\"png\";s:2:\"id\";i:231;s:5:\"title\";s:5:\"logow\";s:3:\"url\";s:53:\"\/wp-content\/uploads\/2023\/11\/\u7eb3\u72ee\u82f1\u6587logo_2023.png\";s:4:\"link\";s:1:\"\/\";s:3:\"alt\";s:0:\"\";s:6:\"author\";s:1:\"1\";s:11:\"description\";s:0:\"\";s:7:\"caption\";s:0:\"\";s:4:\"name\";s:5:\"logow\";s:6:\"status\";s:7:\"inherit\";s:8:\"modified\";i:1698398331000;s:4:\"mime\";s:9:\"image\/png\";s:4:\"icon\";s:60:\"http:\/\/themetest3.local\/wp-includes\/images\/media\/default.png\";s:13:\"dateFormatted\";s:17:\"2023\u5e7410\u670827\u65e5\";s:6:\"nonces\";a:3:{s:6:\"update\";s:10:\"66fe8ad057\";s:6:\"delete\";s:10:\"794e9b4d20\";s:4:\"edit\";s:10:\"4a1d3c33be\";}s:8:\"editLink\";s:62:\"http:\/\/themetest3.local\/wp-admin\/post.php?post=231&action=edit\";s:4:\"meta\";b:0;s:10:\"authorName\";s:5:\"admin\";s:10:\"authorLink\";s:44:\"http:\/\/themetest3.local\/wp-admin\/profile.php\";s:15:\"uploadedToTitle\";s:18:\"\u7f51\u7ad9\u5934\u90e8\u6a21\u677f\";s:14:\"uploadedToLink\";s:61:\"http:\/\/themetest3.local\/wp-admin\/post.php?post=13&action=edit\";s:15:\"filesizeInBytes\";i:6501;s:21:\"filesizeHumanReadable\";s:4:\"6 KB\";s:7:\"context\";s:0:\"\";s:6:\"height\";i:133;s:5:\"width\";i:330;s:11:\"orientation\";s:9:\"landscape\";s:5:\"sizes\";a:3:{s:9:\"thumbnail\";a:4:{s:6:\"height\";i:133;s:5:\"width\";i:150;s:3:\"url\";s:95:\"http:\/\/data.themepark.com.cn\/2021\/n\/smartenterprise_data\/qy20\/uploads\/2023\/10\/logow-150x133.png\";s:11:\"orientation\";s:9:\"landscape\";}s:6:\"medium\";a:4:{s:6:\"height\";i:121;s:5:\"width\";i:300;s:3:\"url\";s:95:\"http:\/\/data.themepark.com.cn\/2021\/n\/smartenterprise_data\/qy20\/uploads\/2023\/10\/logow-300x121.png\";s:11:\"orientation\";s:9:\"landscape\";}s:4:\"full\";a:4:{s:3:\"url\";s:53:\"\/wp-content\/uploads\/2023\/11\/\u7eb3\u72ee\u82f1\u6587logo_2023.png\";s:6:\"height\";i:133;s:5:\"width\";i:330;s:11:\"orientation\";s:9:\"landscape\";}}s:6:\"compat\";a:2:{s:4:\"item\";s:0:\"\";s:4:\"meta\";s:0:\"\";}}}"],"_hidesearch":[null],"_optop2":[""],"_optop3":[null],"_betterdocs_reusable_block_ids":["a:0:{}"]},"medium_url":"https:\/\/www.naxauie.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04-300x222.png","thumbnail_url":"https:\/\/www.naxauie.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04-150x150.png","full_url":"https:\/\/www.naxauie.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04.png","_links":{"self":[{"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/posts\/657","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/comments?post=657"}],"version-history":[{"count":1,"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/posts\/657\/revisions"}],"predecessor-version":[{"id":3570,"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/posts\/657\/revisions\/3570"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/media\/866"}],"wp:attachment":[{"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/media?parent=657"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/categories?post=657"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.naxauie.com\/ru\/wp-json\/wp\/v2\/tags?post=657"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}