{"id":5188,"date":"2025-02-10T08:50:05","date_gmt":"2025-02-10T00:50:05","guid":{"rendered":"https:\/\/www.naxauam.com\/?post_type=docs&p=5188"},"modified":"2025-02-10T15:30:24","modified_gmt":"2025-02-10T07:30:24","password":"","slug":"ta-c-\ub2e4\uc774\uc544\ubaac\ub4dc-\ucf54\ud305\uc758-\ucd08\uc800\uc628-\uc99d\ucc29","status":"publish","type":"docs","link":"https:\/\/www.naxauie.com\/ko\/\ubb38\uc11c\/ta-c-\ub2e4\uc774\uc544\ubaac\ub4dc-\ucf54\ud305\uc758-\ucd08\uc800\uc628-\uc99d\ucc29\/","title":{"rendered":"ta-C, \uc800\uc628 \uae08\uad11\uc11d \uce35"},"content":{"rendered":"

\u4ec0\u4e48\u662fta-C\u91d1\u521a\u77f3\u6d82\u5c42<\/h2>\n\n\n\n

ta-C \u91d1\u521a\u77f3\u6d82\u5c64\u5373\u56db\u9762\u4f53\u975e\u6676\u78b3(\uc0ac\uba74\uccb4 \ube44\uc815\uc9c8 \ud0c4\uc18c) \u6d82\u5c64\uff0c\u662f\u7c7b\u91d1\u521a\u77f3\u6d82\u5c64\uff08DLC\uff09\u7684\u4e00\u79cd\uff0c\u5c5e\u4e8e\u65e0\u6c22 DLC \u6d82\u5c64\u3002\u663e\u5fae\u786c\u5ea6\u53ef\u8fbe 3000 - 8500hv\u3002<\/p>\n\n\n\n

\u5f53ta-C\u663e\u5fae\u786c\u5ea6\u8d85\u8fc77500HV\u65f6\uff0c\u5176\u5404\u79cd\u6750\u8d28\u6027\u5df2\u7ecf\u975e\u5e38\u8fd1\u5929\u7136\u91d1\u521a\u77f3\u3002\u6211\u4eec\u8bf4\u4e3a\u91d1\u521a\u77f3\u6d82\u5c42\u3002CVD\u7684900\u2103\u9ad8\u6e29\u9ad8\u538b\u6c89\u79ef\u6280\u672f\uff0c\u7eb3\u72ee\u79bb\u5b50\u6e90ta-C\uff0c\u53ef\u4ee5\u572880\u2103\u6c89\u79ef\u5b8c\u7f8e\u7684\u91d1\u521a\u77f3\u6d82\u5c42\uff0c\u9ad8\u7ed3\u5408\u529b\u4e14\u57fa\u672c\u4e0d\u53d7\u6750\u6599\u7c7b\u578b\u9650\u5236\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u7406\u60f3\u6750\u6599\u4e2d\uff0c\u77f3\u58a8\u4e3a\u5e73\u9762\u7ed3\u6784\uff0c100%\u7684sp2\uff0c\u91d1\u521a\u77f3\u4e3a\u7acb\u9ad4\u7ed3\u6784\uff0c100%\u7684sp3\u3002\u800cDLC\u4e3asp2\u548csp3\u7684\u6742\u5316\u7269\u3002\u901a\u5e38\u8bf4\u7684DLC\u5c42\uff0c\u4e3a\u9ed1\u7070\u8272\u9ad8sp2\u542b\u91cf\u7684\u78b3\u819c\uff0c10-20%\u7684\u542b\u6c22\u91cf\u3002\u901a\u5e38ta-C\u5c42\uff0c\u4e3asp3\u542b\u91cf\u8d85\u8fc730%\u7684\u78b3\u819c\u3002<\/p>\n\n\n\n

\u7eb3\u72ee\u91d1\u521a\u77f3\u6d82\u5c64<\/h2>\n\n\n\n

\u7eb3\u72ee\u91d1\u521a\u77f3\u6d82\u5c42 \u4e3a\u8fc7\u8651\u5f27\u6280\u672f\u5236\u5907\u7684sp3\u542b\u91cf\u8d85\u8fc780%\u7684\u9ad8\u786cDLC\u3002\u8fd9\u6d82\u5c42\uff0c\u4ee5\u901a\u8fc7\u767e\u683c\u6d4b\u8bd5\u3001\u53cc85 48h\u6d4b\u8bd5\u3001\u94a2\u4e1d\u7ed2\u6469\u64e6\u6d4b\u8bd5\u3001\u8150\u8680\u6d4b\u8bd5\u3002\u53ef\u4ee5\u5e7f\u6cdb\u7528\u4e8eITO\u73bb\u7483\u3001\u8d85\u5bfc\u70ed\u73bb\u7483\u7b49\u5206\u91d1\u5c5e\u6750\u6599\u6539\u6027\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

ta-C \uc81c\ud488\uc740 \ub192\uc740 \uc804\ub3c4\uc5f4\uc744 \uac00\uc9c0\uace0 \uc788\uae30 \ub54c\ubb38\uc5d0 \uc0ac\ub78c\uc774 1000W\/m.k\uc5d0 \ub3c4\ub2ec\ud560 \uc218 \uc788\uc9c0\ub9cc \uc77c\ubc18 \uc7ac\ub8cc\ubcf4\ub2e4 \ud6e8\uc52c \ub192\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\ub450\uaed8\uac00 20nm \uc774\ud558\uc77c \ub54c, Ta-C \uce35\uc740 \ud30c\ub780\uc0c9 \uc601\uc5ed\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 90% \uc774\uc0c1\uc758 \uac00\uc2dc\uad11 \ud22c\uacfc\uc131\uc744 \uac00\uc9c0\uba70, \uce35 \uc900\ube44 \uacf5\uc815\uacfc \uc2dc\uac04\uc5d0 \ub300\ud55c \uc81c\ud55c\uc774 \uc788\uc73c\uba70, PVD \ubc29\ubc95\uc740 \uae08\uc11d\uce35\uc744 \uc900\ube44\ud558\uc9c0 \ubabb\ud558\uc9c0\ub9cc CVD \uacf5\uc815\uc740 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\u57fa\u6750<\/td>\u767d\u73bb\u7483<\/td><\/td><\/tr>
\uc544\ub2c8\uc694.<\/td>\u9540\u819c\u524d \u9540\u819c\u5f8c<\/td><\/td><\/tr>
1<\/td>94% 91%<\/td><\/td><\/tr>
2<\/td>94% 91%<\/td><\/td><\/tr>
3<\/td>94% 92%<\/td><\/td><\/tr>
4<\/td>94% 91%<\/td><\/td><\/tr>
5<\/td>94% 91%<\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
\"\"<\/figure>\n\n\n\n

\u4f4e\u6e29\u9ad8\u80fd\u7684\u6c89\u79ef\u65b9\u5f0f<\/h3>\n\n\n\n

\uae08\uad11\uc758 \uc0dd\uc0b0 \uc18d\ub3c4 R, \uc644\uc804\ud558\uac8c C+\uc804\ub958\ub7c9 \uacb0\uc815. \uadf8\ub7ec\ub098 \uc800\uc628-\uace0\uc804\ub958\ub7c9 \ubaa8\ub378, \ud544\uc694\ud55c \uc0dd\uc0b0\ub7c9\uc744 \uc548\uc804\ud558\uac8c \ub9e4 \ud3c9\ubc29 \ub9ac\ud130\uc758 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4\ub85c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

SP3 \ud0a4 \ud3ec\ud568\ub7c9, 100EV\uc758 \uc131\ub2a5 \uc544\ub798\uc5d0\uc11c \uc57d 85%\ub77c\ub294 \ub9e4\uc6b0 \ud070 \uac12\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

SP3 \uc8fc\uc694 \ud568\ub7c9, 150\u2103 \uc774\uc0c1\uc5d0\uc11c \ud558\uac15.<\/p>\n\n\n\n

\ub124\ud2b8\uc6cc\ud06c \uad00\ub9ac \uae30\uc220<\/h3>\n\n\n\n

\u5f2f\u7ba1\u78c1\u8fc7\u6ee4\u771f\u7a7a\u9634\u6781\u7535\u5f27\u79bb\u5b50\u9540\u88c5\u7f6e \u3001\u76f4\u7ba1\u52a0\u5f2f\u8bbe\u8ba1\u901a\u8fc7\u5b9e\u73b0\u5bf9\u7b49\u79bb\u5b50\u4f53\u4e2d\u7684\u8d28\u91cf\uff0c\u5927\u9897\u7c92\u7684\u9ad8\u6548\u7387\u53bb\u9664\uff0c\u53ef\u6c89\u79ef\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\u548c\u66f4\u5b8c\u7f8e\u7684\u819c\u6750\u6599\u3002\u4f46\u662f\u7531\u4e8e\u5f2f\u7ba1\u8fc7\u6ee4\u6389\u4e86\u4e00\u534a\u4ee5\u4e0a\u7684\u9897\u7c92\u548c\u79bb\u5b50\uff0c\u819c\u6c89\u79ef\u901f\u5ea6\u660e\u663e\u964d\u4f4e\u3002\u66f4\u597d\u8fc7\u6ee4\u6548\u679c\uff0c\u610f\u5473\u7740\u66f4\u4f4e\u6c89\u79e9\u6548\u7387\u3002<\/p>\n\n\n\n

\ub530\ub77c\uc11c \ub098\ub77c\ub294 \ube44\uacfc\uc0b0\ud654\ud0c4\uc18c\ub97c \uc0ac\uc6a9\ud558\uc9c0 \uc54a\ub294 Ta-C\uc758 \uc0ac\uc6a9\uc744 \ud655\ub300\ud558\uc5ec \ud488\uc9c8\uacfc \uc0dd\uc0b0\uc131\uc758 \uade0\ud615\uc744 \uc2e4\ud604\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u7eb3\u72ee\u53ef\u5b9e\u73b0\u591a\u7ea7\u5f2f\u7ba1\u7406\u8fc7\u6ee4\uff0c\u4ece\u800c\u83b7\u5f97\u9ad8\u5ea6\u53ef\u63a7\u7684\u4f4e\u751f\u957f\u7f3a\u9677\u91d1\u521a\u77f3\u8584\u819c\u3002\u5bf9\u4e8e10-20nm\u7684\u8d85\u8584\u6d82\u5c42\uff0c\u66f4\u4f4e\u7f3a\u9677\u7387\u624d\u80fd\u4fdd\u8bc1\u819c\u7684\u4ea7\u54c1\u8d28\u91cf\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

ta-C\uc758 \ub2e4\uce35 \uacb0\ud569 \uad6c\uc870<\/h3>\n\n\n\n

\u7eb3\u72eeta-C\u901a\u5e38\u4e3a\u590d\u5408\u819c\u7ed3\u6784\uff0c\u6709Cr\u3001Ti\u7b49\u91d1\u5c5e\u6253\u5e95\u5c42\uff0c\u589e\u52a0\u4e0e\u57fa\u6750\u7ed3\u5408\u529b\uff0cta-C\uff1aX\u8fc7\u6e21\u5c42\uff0csp3\/sp2\u4f4e\u6bd4\u4f8b\u5c42\uff0c\u53casp3\/sp2\u9ad8\u6bd4\u4f8b\u5c42\u7ec4\u6210\u3002<\/p>\n\n\n\n

\u968f\u7740SP3\u542b\u91cf\u589e\u52a0\uff0c\u819c\u6750\u8cea\u5bc6\u5ea6\u548c\u538b\u529b\u7ebf\u6027\u589e\u5927\uff0c\u9700\u8981\u591a\u5c42\u7ed3\u6784\u6765\u514b\u670d\u8d85\u786c\u819c\u7684\u9ad8\u5e94\u529b\u3002\u5982\u679c\u9700\u8981\u505a\u8d85\u539a\u7684ta-C\u819c\uff0c\u5219\u9700\u505ata-C\uff1aXta-C\u7684\u53e0\u5c42\u8bbe\u8ba1\u3002<\/p>\n\n\n\n

ta-C\uc640 \uadf8 DLC \uce35\uc740 \ub192\uc740 \uc548\uc815\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

Ta-C \ucd08\uc800\uc804\ub825 \uad00\ub828 \uba87 \uac00\uc9c0 \uce21\uc815\uac12<\/h2>\n\n\n\n

\uc124\uba85\uc774 \ud544\uc694\ud55c \uac83\uc740 \uc774\uc804 SP3\uc758 \uc6a9\ub7c9\uc774 \ub77c\ub9cc \ud14c\uc2a4\ud2b8\uc640 \uac19\uc740 \uc0c1\ub300 \ud14c\uc2a4\ud2b8 \ubc29\ubc95\uc774\ub77c\ub294 \uac83\uc785\ub2c8\ub2e4. \uc6b0\ub9ac\ub294 SP3\uc758 \uc6a9\ub7c9\uc744 \uc815\ud655\ud558\uac8c \uce21\uc815\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

1\ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 \uc774\ud558\uc5d0\uc11c\ub294 C\uae08\uc11d\uc758 \uacbd\ub3c4\ub97c \uc815\ud655\ud558\uac8c \uce21\uc815\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc6b0\ub9ac\ub294 \uc77c\ubc18\uc801\uc73c\ub85c SP3\uc758 \uc608\uc2dc\ub97c \uae30\ubc18\uc73c\ub85c \uacbd\ub3c4\ub97c \uce21\uc815\ud558\uc9c0\ub9cc, \uc77c\ubc18 C\uae08\uc11d\uc758 \uacbd\uc6b0 \uc9c1\uc811 \uacbd\ub3c4\ub97c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\u9644\u7740\u529b\u6d4b\u8bd5<\/h3>\n\n\n\n
\u6750\u6599<\/td>\u819c\u539a(nm)<\/td>\u4e34\u754c\u8d1f\u8f7d(N)<\/td><\/tr>
\u73bb\u7483<\/td>20<\/td>30<\/td><\/tr>
\u6811\u8102<\/td>20<\/td>25<\/td><\/tr>
\u9ad8\u901f\u94a2<\/td>200<\/td>75<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

\ud14c\uc2a4\ud2b8<\/h3>\n\n\n\n
    \n
  • 5%\u76d0\u96fe\u8bd5\u9a8c\uff1a120h<\/li>\n\n\n\n
  • \u53cc85\u6d4b\u8bd5\uff1a48h<\/li>\n\n\n\n
  • 1kg \uccb4\uc911 \uce21\uc815: 5000\ud68c<\/li>\n\n\n\n
  • \uad11\ud22c\uacfc\uc131 \ud14c\uc2a4\ud2b8: 90% \uc774\uc0c1<\/li>\n\n\n\n
  • \u7ec6\u8080\u6bd2\u6027\u8bd5\u9a8c\uff1a\u9075\u7167ISO10993-5\u548cGB\/T16886.5\u6807\u51c6\u8981\u6c42\uff0c\u91c7\u7528\u56db\u7532\u57fa\u5076\u6c2e\u5511\u76d0\u5fae\u91cf\u9176\u53cd\u5e94\u6bd4\u8272\u6cd5\uff08MTT\u6cd5\uff09\uff1a\u7ec6\u8080\u6bd2\u6027\u4e3a0\u7ea7\uff0c\u5176\u7ec6\u8080\u6bd2\u6027\u7565\u4f4e\u4e8e\u7eaf\u949b\u3002<\/li>\n\n\n\n
  • \u6eb6\u8840\u8bd5\u9a8c: \u4f9d\u7167YY\/T0127.1-93\u6807\u51c6\uff0c\u77f3\u58a8\u7c89\u7ec4\u7684\u6eb6\u8840\u7387\u4e3a3.08%\uff0c\u4e3a\u65e0\u6eb6\u8840\u4f5c\u7528\u6750\u6599\u3002<\/li>\n<\/ul>\n\n\n\n

    ta-C\uc758 \uc801\uc6a9<\/h2>\n\n\n\n

    \ub2e4\uc218\uc758 \uc870\uac74\uc5d0\uc11c, ta-C\uc758 \uacbd\ub3c4\ub294 \uc801\uc6a9 \uc601\uc5ed\uc774 \ub3d9\uc77c\ud558\uc9c0 \uc54a\uc9c0\ub9cc 10\ubbf8\ub9ac \uc774\uc0c1\uc758 \ucd08\uacbd\ub3c4\uc5d0 \ub300\ud574\uc11c\ub294 3000HV \uc774\uc0c1\uc758 \uacbd\ub3c4\ub97c \ub098\ud0c0\ub0b4\uba70 \uc77c\ubc18\uc801\uc73c\ub85c \ud6c4\ucc98\ub9ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

    ta-C\uae08\uc11d\uce35, \ub2e4\uc74c\uacfc \uac19\uc740 \uc6b0\uc218\ud55c \uc18c\uc7ac \ud2b9\uc131 \uc81c\uacf5: \ub192\uc740 \uc804\ub3c4\uc5f4 \u5316\u5b66\u6027\u80fd\u7a33\u5b9a \u9ad8\u5f39\u6027\u6a21\u91cf \u9ad8\u786c\u8010\u78e8\u6027 \u8010\u6e85\u5c04 \u6781\u9ad8\u7684\u8f7d\u6d41\u5b50\u8fc1\u79fb\u7387 (\uc804\uc790 \ubc0f \uacf5\uae30\uad6c\uba4d) \u9ad8\u7981\u5e26\u5bbd\u5ea6 \u4f4e\u9038\u51fa\u529f \u5bf9\u7d2b\u5916\u7dda\u654f\u611f\uff08\u5438\u6536\uff09 \u7ea2\u5916\u589e\u900f\u6027 \u9ad8\u7535\u963b\u7387 \u9ad8\u4ecb\u7535\u5e38\u6570 \u9ad8\u51fb\u7a7f\u70b9 \u65e0\u6c22 \u8d85\u8584 \u8d1f\u7535\u5b50\u4eb2\u548c\u52bf (\u5bbd\u5149\u5b66\u5e26\u9699) \u58f0\u6ce2\u4f20\u64ad\u5feb\uff0c\u4fdd\u771f\u5ea6\u9ad8 \u8010\u70ed\u51b2\u51fb \u6291\u83cc\u6027 \u81ea\u6d01\u6027 <\/p>\n\n\n\n

    \u7eb3\u7c73\u7ea7\u5149\u5b66\u6539\u53d8\u6027\u819c (\u9ad8\u900f\u6027)<\/h3>\n\n\n\n
      \n
    • ITO \ubcf4\ud638<\/li>\n\n\n\n
    • \u7ea2\u5916\u70ed\u6210\u6210\u50cf\u88c5\u7f6e\u7a97\u53e3\uff08\u7ea2\u5916\u589e\u900f\u6027\uff09<\/li>\n\n\n\n
    • X-\uc120 \ucc3d\uad6c(\u9ad8\u900f\u3001\u8010\u8f90\u5c04)<\/li>\n\n\n\n
    • CO2 \uc870\uba85 \ucc3d\uad6c<\/li>\n\n\n\n
    • \u9ad8\u901f\u62e6\u622a\u5bfc\u5f39\u5934\u7f69<\/li>\n\n\n\n
    • \u7d2b\u5916\u7dda\u6216\u653e\u5c04\u7dda\u4f20\u611f\u5668<\/li>\n<\/ul>\n\n\n\n

      \u5bfc\u70ed\u819c(\u9ad8\u5bfc\u70ed)<\/h3>\n\n\n\n
        \n
      • \uace0\ud6a8\uc728 \ubc0f \uace0\ucd9c\ub825 \uc7a5\ube44<\/li>\n\n\n\n
      • \u73bb\u7483\u900f\u660e\u5bfc\u70ed\u819c<\/li>\n\n\n\n
      • \u5149\u7535\u5b50\u5668\u4ef6\u6563\u70ed\u819c<\/li>\n\n\n\n
      • \u9ad8\u9891\u3001\u5fae\u6ce2\u5668\u4ef6\u70ed\u6c89<\/li>\n\n\n\n
      • \u6e29\u5ea6\u4f20\u611f\u5668<\/li>\n<\/ul>\n\n\n\n

        \u58f0\u5b66<\/h3>\n\n\n\n
          \n
        • \u626c\u58f0\u5668\u58f0\u819c<\/li>\n\n\n\n
        • \u58f0\u8868\u9762\u6ce2\u5668\u4ef6\uff08SAW\uff09[\u9ad8\u9891\u5e26\u5bbd\u5ea6\uff084GHZ-6GHZ\uff09\u6ee4\u6ce2\u5668<\/li>\n<\/ul>\n\n\n\n

          \u8010\u78e8\u88c5\u9970\u9540<\/h3>\n\n\n\n

          \u8d85\u786c\u5200\u5177\u6d82\u5c64<\/h3>\n\n\n\n
            \n
          • PCB\ud310 \ubc0f \uae30\ud310<\/li>\n\n\n\n
          • 12%\u9ad8\u7845\u94dd\u5408\u91d1\u52a0\u5de5\uff1b\u94dc\u3001\u94f6\u3001\u91d1\u7b49\u6709\u8272\u91d1\u5c5e\u52a0\u5de5\uff1b<\/li>\n\n\n\n
          • \u6728\u5de5\u5200\u3001\u4e9a\u514b\u529b\u6570\u63a7\u5200\u5177<\/li>\n\n\n\n
          • \u5243\u987b\u5200\u3001\u8584\u819c\u5207\u7247\u5200<\/li>\n\n\n\n
          • \u9ad8\u7aef\u53a8\u5177\u5200<\/li>\n<\/ul>\n\n\n\n

            \u8d85\u786c\u4e4b\u6da6\u6ed1\u6d82\u5c42(\u5bf9\u4eba\u4f53\u65e0\u6bd2\u526f\u4f5c\u7528, \u751f\u7269\u76f8\u5bb9\u6027, \u8010\u78e8\u81ea\u6da6\u6ed1)<\/h3>\n\n\n\n
              \n
            • \u690d\u5165\u533b\u7597\u5668\u68b0\uff1a\u4eba\u5de5\u5173\u8282\u3001\u4e49\u9f7f\u3001\u7259\u6258<\/li>\n\n\n\n
            • \u9ad8\u9891\u7535\u5200<\/li>\n<\/ul>\n\n\n\n

              \u6c7d\u8f66\u96f6\u914d\u4ef6<\/h3>\n\n\n\n

              \u5404\u79cd\u91d1\u521a\u77f3\u8584\u819c\u7684\u7279\u6027\u4e0e\u5929\u7136\u91d1\u521a\u77f3\u7279\u6027\u7684\u6bd4\u8f83<\/h2>\n\n\n\n

              \u7eb3\u72ee\u91d1\u521a\u77f3\u819c\uff0c\u4e3a10-800nm\u8d85\u8584\u8d85\u786c (\u5927\u4e8e4000HV\u4e3a\u8d85\u786c\u6d82\u5c42).<\/p>\n\n\n\n

                \n
              • \u6c89\u79ef\u6e29\u5ea6\uff1ata-C\u4e3a80\u2103; CVD\u6cd5\u901a\u5e38\u4e3a900\u2103\u4ee5\u4e0a;<\/li>\n\n\n\n
              • \u819c\u539a\uff1ata-C\u6cd5\u901a\u5e38\u4e3a\u7eb3\u7c73\u7ea7\uff0c\u91d1\u521a\u77f3\u6cd5\u7406\u8bba\u4e0a\u65e0\u539a\u5ea6\u9650\u5236\uff1b\u5728\u5fae\u94bb\u7b49\u5200\u5177\u4e0a\uff0c\u901a\u5e38\u4e3a5-10\u5fae\u7c73\u3002<\/li>\n\n\n\n
              • \u6676\u4f53\u7ed3\u6784\uff1ata-C\u4e3a\u56db\u9762\u4f53\u975e\u6676\u6001; CVD\u4e3a\u5355\u6676\u6216\u591a\u6676\u7ed3\u6784\u3002<\/li>\n\n\n\n
              • \u786c\u5ea6\uff1aCVD\u91d1\u521a\u77f3\u66f4\u786c\uff0c\u53ef\u4ee5\u5236\u9020\u65e0\u7f3a\u9677\u7684\u91d1\u521a\u77f3\u6750\u6599<\/li>\n\n\n\n
              • \u5e94\u7528\u9886\u57df\uff1ata-C\u901a\u5e38\u7528\u4e8e\u8d85\u8584\u4fdd\u62a4\u6216\u5bfc\u70ed\uff0c\u7531\u4e8e\u6c89\u79ef\u6e29\u5ea6\u4f4e\uff0c\u4e0d\u53d7\u57fa\u6750\u9650\u5236\uff0c\u5206\u4e3a\u8d85\u8584\u5149\u5b66\u6539\u6027\u819c\u53ca\u8d85\u786c\u81ea\u6da6\u6ed1\u6539\u6027\u819c\u3002\u800cCVD\u7531\u4e8e\u9ad8\u6e29\u53ca\u5c3a\u5bf8\u9650\u5236\uff0c\u901a\u5e38\u7528\u4e8e\u786c\u8d28\u5408\u91d1\u5200\u5177\uff0c\u9ad8\u7aef\u88c5\u9970\u54c1\u7b49\uff0c\u3002<\/li>\n<\/ul>\n\n\n\n
                \ud2b9\uc9d5<\/u><\/strong><\/td>\u5929\u7136\u91d1\u521a\u77f3<\/strong><\/td>CVD<\/strong><\/td>DLC (a:CH) <\/strong><\/td>ta-C<\/strong><\/td><\/tr>
                \uacbd\ub3c4(Gpa)<\/strong><\/td>100<\/td>80 – 100<\/td>10 – 50<\/td>80 – 100<\/td><\/tr>
                \ubc00\ub3c4(g\/cm3)<\/strong><\/td>3.5<\/td>3.2 – 3.4<\/td>1.7 – 2.2<\/td>3.0 – 3.2<\/td><\/tr>
                \u6469\u64e6\u7cfb\u6570<\/strong><\/td>0.1<\/td>0.1(\uad11\ud0dd)<\/td>0.1<\/td>0.1<\/td><\/tr>
                \u7c97\u7cd9\u5ea6<\/strong><\/td>-<\/td>3\u00b5m<\/td>\u5149\u5b66\u5e73\u6ed1<\/td>\u5149\u5b66\u5e73\u6ed1<\/td><\/tr>
                \u9644\u7740\u529b<\/strong><\/td>-<\/td>\u4f4e<\/td>\u4e2d<\/td>\u9ad8<\/td><\/tr>
                \u6c89\u79ef\u6e29\u5ea6<\/strong><\/td>-<\/td>>600\u00b0 C<\/td>120\u00b0C - 325\u00b0C<\/td>80\u00b0C - 150\u00b0C<\/td><\/tr>
                \u7ed3\u6784<\/strong><\/td>\u7d50\u6676<\/td>\u7d50\u6676<\/td>\u975e\u6676\u6001<\/td>\u975e\u6676\u6001<\/td><\/tr>
                \u53cd\u61c9\u6027\u6c14\u4f53<\/strong><\/td>-<\/td>\uc608<\/td>\uc608<\/td>\uc120\ud0dd<\/td><\/tr>
                \u8010\u6eab\u6027<\/strong><\/strong><\/td>-<\/td>600\u00b0 C+<\/td>250\u00b0C - 350\u00b0C<\/td>500\u00b0 C+<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                \u30ca\u72eeP\u7cfb\u5217 DLC\u771f\u7a7a\u9540\u819c\u8bbe\u5907<\/h2>\n\n\n\n

                \ub098\ub178\uc758 P \uc2dc\ub9ac\uc988\uc5d0\ub294 \uc138 \uac00\uc9c0 \uae30\uc220, \uc989 PeCVD, \uc6d0\uc18c \ubc0f \uacb0\ud569 \uae30\uc220\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

                \u4ec0\u4e48\u662fta-C\u91d1\u521a\u77f3\u6d82\u5c42 ta-C \u91d1\u521a\u77f3\u6d82\u5c42\u5373\u56db\u9762\u4f53\u975e\u6676\u78b3\uff08tetrahedral amorphous carbon\uff09\u6d82\u5c42 \uff0c\u662f\u7c7b\u91d1\u521a\u77f3\u6d82\u5c42\uff08DLC\uff09\u7684\u4e00\u79cd\uff0c\u5c5e\u4e8e\u65e0\u6c22 DLC \u6d82\u5c42\u3002\u5176\u663e\u5fae\u786c\u5ea6\u53ef\u8fbe 3000 – 8500hv\u3002 \u5f53ta-C\u663e\u5fae\u786c\u5ea6\u8d85\u8fc77500HV\u65f6\uff0c\u5176\u5404\u79cd\u6750\u6599\u7269\u6027\u5df2\u7ecf\u975e\u5e38\u63a5\u8fd1\u5929\u7136\u91d1\u521a\u77f3\u3002\u6211\u4eec\u4e60\u60ef\u79f0\u4e3a\u91d1\u521a\u77f3\u6d82\u5c42\u3002\u6709\u522b\u4e8eCVD\u7684900\u2103\u9ad8\u6e29\u9ad8\u538b\u6c89\u79ef\u6280\u672f\uff0c\u7eb3\u72ee\u79bb\u5b50\u6e90ta-C\uff0c\u53ef\u4ee5\u572880\u2103\u6c89\u79ef\u5b8c\u7f8e\u7684\u91d1\u521a\u77f3\u6d82\u5c42\uff0c\u9ad8\u7ed3\u5408\u529b\u4e14\u57fa\u672c\u4e0d\u53d7\u6750\u6599\u7c7b\u578b\u9650\u5236\u3002 \u7406\u60f3\u6750\u6599\u4e2d\uff0c\u77f3\u58a8\u4e3a\u5e73\u9762\u7ed3\u6784\uff0c100%\u7684sp2\uff1b\u91d1\u521a\u77f3\u4e3a\u7acb\u4f53\u7ed3\u6784\uff0c100%\u7684sp3\u3002\u800cDLC\u4e3asp2\u548csp3\u7684\u6742\u5316\u7269\u3002\u901a\u5e38\u8bf4\u7684DLC\u6d82\u5c42\uff0c\u4e3a\u9ed1\u7070\u8272\u9ad8sp2\u542b\u91cf\u7684\u78b3\u819c\uff0c10-20%\u7684\u542b\u6c22\u91cf\u3002\u901a\u5e38ta-C\u6d82\u5c42\uff0c\u4e3asp3\u542b\u91cf\u8d85\u8fc730%\u7684\u78b3\u819c\u3002 \u7eb3\u72ee\u91d1\u521a\u77f3\u6d82\u5c42 \u7eb3\u72ee\u91d1\u521a\u77f3\u6d82\u5c42\uff0c\u4e3a\u8fc7\u8651\u5f27\u6280\u672f\u5236\u5907\u7684sp3\u542b\u91cf\u8d85\u8fc780%\u7684\u9ad8\u786cDLC\u3002\u8be5\u6d82\u5c42\uff0c\u4ee5\u901a\u8fc7\u767e\u683c\u6d4b\u8bd5\u3001\u53cc85 48h\u6d4b\u8bd5\uff0c\u94a2\u4e1d\u7ed2\u6469\u64e6\u6d4b\u8bd5\uff0c\u8150\u8680\u6d4b\u8bd5\u3002\u53ef\u4ee5\u5e7f\u6cdb\u7528\u4e8eITO\u73bb\u7483\u3001\u8d85\u5bfc\u70ed\u73bb\u7483\u7b49\u5206\u91d1\u5c5e\u6750\u6599\u6539\u6027\u3002 ta-C\u819c\u5177\u6709\u9ad8\u5bfc\u70ed\u6027\uff0c\u7531\u4e8e\u819c\u7ed3\u6784\uff0c\u4e2a\u4eba\u504f\u5411\u4e8e1000W\/m.k\u8fd9\u4e2a\u6570\u503c\u3002\u4f46\u662f\u4f9d\u7136\u5927\u5e45\u9ad8\u4e8e\u666e\u901a\u6750\u6599\u3002 \u5728\u819c\u539a\u4f4e\u4e8e20nm\u65f6\uff0cta-C \u6d82\u5c42\uff0c\u5373\u4f7f\u5728\u84dd\u5173\u533a\u57df\uff0c\u4f9d\u7136\u5177\u6709\u9ad8\u4e8e90%\u7684\u53ef\u89c1\u5149\u900f\u8fc7\u6027\u3002\u53d7\u5236\u4e8e\u6d82\u5c42\u5236\u5907\u5de5\u827a\u548c\u65f6\u95f4\u6210\u672c\u9650\u5236\uff0cPVD\u6cd5\u65e0\u6cd5\u5236\u5907\u539a\u7684\u91d1\u521a\u77f3\u6d82\u5c42\u3002\u800cCVD\u5de5\u827a\u53ef\u4ee5\u3002 \u57fa\u6750 \u767d\u73bb\u7483 No. \u9540\u819c\u524d\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u9540\u819c\u540e 1 94%           91% 2 94%           91% 3 94%           92% 4 94%           91% 5 94%           91% \u4f4e\u6e29\u9ad8\u80fd\u7684\u6c89\u79ef\u65b9\u5f0f \u91d1\u521a\u77f3\u819c\u7684\u751f\u4ea7\u901f\u7387R\uff0c\u5b8c\u5168\u7531C+\u79bb\u5b50\u901a\u91cf\u51b3\u5b9a\u3002\u800c\u4f4e\u6e29\u9ad8\u79bb\u5b50\u80fd\u91cf\u7684\u6c89\u79ef\u6a21\u5f0f\uff0c\u9700\u8981\u4ea7\u751f\u5927\u4e8e\u51e0\u6beb\u5b89\u6bcf\u5e73\u65b9\u5398\u7c73\u7684\u9ad8\u7535\u6d41\u5bc6\u5ea6\u7684\u7535\u6e90\u652f\u6301\u3002 sp3\u952e\u542b\u91cf\uff0c\u5728100ev\u7684\u80fd\u91cf\u4e0b\uff0c\u53ef\u4ee5\u83b7\u5f97\u6781\u5927\u503c\uff0c\u7ea685%\u3002 sp3\u952e\u542b\u91cf\uff0c\u5728150\u2103\u4ee5\u4e0a\u4e0b\u964d\u3002 \u7eb3\u72ee\u5f2f\u7ba1\u8fc7\u6ee4\u5f27\u6280\u672f 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\u7eb3\u72ee\u53ef\u5b9e\u73b0\u591a\u7ea7\u5f2f\u7ba1\u8fc7\u6ee4\uff0c\u4ece\u800c\u83b7\u5f97\u9ad8\u5ea6\u53ef\u63a7\u7684\u4f4e\u751f\u957f\u7f3a\u9677\u91d1\u521a\u77f3\u8584\u819c\u3002\u5bf9\u4e8e10-20nm\u7684\u8d85\u8584\u6d82\u5c42\uff0c\u66f4\u4f4e\u7684\u7f3a\u9677\u7387\u624d\u80fd\u4fdd\u8bc1\u819c\u7684\u4ea7\u54c1\u826f\u7387\u3002 ta-C\u7684\u591a\u5c42\u590d\u5408\u7ed3\u6784 \u7eb3\u72eeta-C\u901a\u5e38\u4e3a\u590d\u5408\u819c\u7ed3\u6784\uff0c\u6709Cr\u3001Ti\u7b49\u91d1\u5c5e\u6253\u5e95\u5c42\uff0c\u589e\u52a0\u4e0e\u57fa\u6750\u7ed3\u5408\u529b\uff0cta-C\uff1aX\u8fc7\u6e21\u5c42\uff0csp3\/sp2\u4f4e\u6bd4\u4f8b\u5c42\uff0c\u53casp3\/sp2\u9ad8\u6bd4\u4f8b\u5c42\u7ec4\u6210\u3002 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\u7531\u4e8e\u819c\u539a\u4f4e\u4e8e1\u5fae\u7c73\uff0c\u6211\u4eec\u4e5f\u4e0d\u80fd\u7cbe\u51c6\u7684\u6d4b\u91cf\u51fata-C\u91d1\u521a\u77f3\u819c\u7684\u786c\u5ea6\u3002\u6211\u4eec\u901a\u5e38\u662f\u6839\u636esp3\u7684\u6bd4\u4f8b\u63a8\u6d4b\u51fa\u819c\u7684\u786c\u5ea6\u3002\u800c\u5bf9\u4e8e\u666e\u901ata-C\u539a\u819c\uff0c\u6211\u4eec\u53ef\u4ee5\u76f4\u89c2\u6d4b\u91cf\u51fa\u819c\u7684\u663e\u5fae\u786c\u5ea6\u3002 \u9644\u7740\u529b\u6d4b\u8bd5 \u6750\u6599 \u819c\u539a(nm) \u4e34\u754c\u8d1f\u8f7d(N) \u73bb\u7483 20 30 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